Multipurpose MEMS thermal sensor based on thermopiles

Randjelović, Danijela; Πετρόπουλος, Αναστάσιος; Kaltsas, G.; Stojanovic, M.; Lazić, Žarko; Djurić, Z.; Matić, Milan

doi:10.1016/j.sna.2007.10.043

Cited by 61 publications

(77 citation statements)

References 16 publications

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“…Due to the mechanical vibration and temperature variation, nanofretting of monocrystalline silicon may exist in the contact interfaces of microdevices. In order to improve the reliability and stability, a large quantity of MEMS/NEMS need to be encapsulated in vacuum environment, such as micro-mass spectrometer, thermopile based sensors, resonators, and so on [5][6][7][8]. Therefore, with the development in MEMS/NEMS, the understanding and control of the nanofretting behaviors of monocrystalline silicon both in atmosphere and vacuum has become an important issue of concern [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Nanofretting behaviors of monocrystalline silicon (100) against diamond tips in atmosphere and vacuum

Qian

et al. 2009

Wear

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Section: Introductionmentioning

confidence: 99%

Nanofretting behaviors of monocrystalline silicon (100) against diamond tips in atmosphere and vacuum

Qian

et al. 2009

Wear

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“…Recently, thermoelectric materials have attracted much attention on the applications of functional devices, such as power generators, coolers, and thermal sensors , for their particular capability of mutual conversion between temperature gradient and electricity [1][2][3][4][5]. The performance of thermoelectric materials is characterized by a dimensionless figure of merit ZT =˛2T/ Ä, wherę , , Ä, and T are Seebeck coefficient, electrical resistivity, thermal conductivity and absolute temperature, respectively.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of micro/nanostructured p-type Bi0.4Sb1.6Te3 and its thermoelectrical properties

Jiang

et al. 2009

Journal of Alloys and Compounds

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“…In order to improve the reliability and stability, a large quantity of MEMS/NEMS need to be encapsulated in vacuum environment, such as thermopilebased sensors, micro-mass spectrometer, resonators, gyroscope, and so on [4][5][6][7]. Because of the temperature variation and mechanical vibration, nanofretting of monocrystalline silicon may exist in the contact interfaces of these microdevices.…”

Section: Introductionmentioning

confidence: 99%

Nanofretting Behavior of Monocrystalline Silicon (100) Against SiO2 Microsphere in Vacuum

Qian

et al. 2008

Tribol Lett

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With an atomic force microscopy, the tangential nanofretting between spherical SiO 2 tips and monocrystalline Si(100) surface was carried out at various displacement amplitudes (0.5-250 nm) under vacuum condition. Similar to fretting, the nanofretting of Si(100)/ SiO 2 pair could also be divided into stick regime and slip regime upon the transition criterion. However, it was found that the energy ratio corresponding to the transition between two nanofretting regimes varied between 0.32 and 0.64, which was higher than the normal value of 0.2 for the transition criterion to determine the partial slip and gross slip regimes in fretting. One of the reasons may be attributed to the effect of adhesion force, since whose magnitude is at the same scale to the value of the applied normal load in nanofretting. During the nanofretting process of Si(100)/ SiO 2 pair, the adhesion force may induce the increase in the maximum static friction force and prevent the contact pair from slipping. The higher the applied load, or the higher the adhesion force, the larger will be the transition displacement amplitude between two regimes in nanofretting. Different from fretting wear, the generation of hillocks was observed on Si(100) surface under the given conditions in nanofretting process. With the increase in the displacement amplitude in slip regime of nanofretting, the height of hillocks first increased and then attained a constant value. Compared to chemical reaction, the mechanical interaction may be the main reason responsible for the formation of silicon hillocks during the nanofretting in vacuum. The results in the research may be helpful to understand the nanofretting failures of components in MEMS/NEMS.

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Multipurpose MEMS thermal sensor based on thermopiles

Cited by 61 publications

References 16 publications

Nanofretting behaviors of monocrystalline silicon (100) against diamond tips in atmosphere and vacuum

Nanofretting behaviors of monocrystalline silicon (100) against diamond tips in atmosphere and vacuum

Synthesis of micro/nanostructured p-type Bi0.4Sb1.6Te3 and its thermoelectrical properties

Nanofretting Behavior of Monocrystalline Silicon (100) Against SiO2 Microsphere in Vacuum

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