Multiplication of Sensor Output Voltage Using Series-Connected Piezoelectric Elements

Kanda, Kensuke; Iga, Yuka; Matsuoka, Junya; Fujita, Takayuki; Higuchi, Kohei; Maenaka, Kazusuke

doi:10.1541/ieejsmas.130.124

Cited by 14 publications

(6 citation statements)

References 13 publications

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“…Since the charge source is not included in the standard SPICE library, the simplest model of a piezoelectric capacitance with initial voltage is proposed. In addition, the calculation using the SPICE model has been consistent with the experimental output voltage for the series-connected 8 piezoelectric elements in the previous work [14] (the focus has the multiplication of output voltage and the description of SPICE model in detail has not been indicated in the reference).…”

Section: Discussionsupporting

confidence: 70%

“…, tensile and compressive stresses), as shown in Figure 1(b). We have experimentally verified the output-voltage multiplication and cancelation [14,15]. However, output voltages reach a limit as an increasing number of elements are connected, resulting from the parasitic capacitance formed by the insulation layer underneath the bottom electrodes, as shown in Figure 2.…”

Section: Introductionmentioning

confidence: 96%

“…Previously, we have reported fine-resolution processing techniques for piezoelectric Pb[Zr,Ti]O 3 (PZT) thin films [12] and proposed a procedure for signal operation for a MEMS mechanical structure using series-connected segmented PZT elements [13,14]. A schematic illustration of the device operation is shown in Figure 1(a).…”

Section: Introductionmentioning

confidence: 99%

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Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Kanda

Saito

Iga

et al. 2012

Sensors

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Series-connected thin film piezoelectric elements can generate large output voltages. The output voltage ideally is proportional to the number of connections. However, parasitic capacitances formed by the insulation layers and derived from peripheral circuitry degrade the output voltage. Conventional circuit models are not suitable for predicting the influence of the parasitic capacitance. Therefore we proposed the simplest model of piezoelectric elements to perform simulation program with integrated circuit emphasis (SPICE) circuit simulations). The effects of the parasitic capacitances on the thin-film Pb(Zr, Ti)O3, (PZT) elements connected in series on a SiO2 insulator are demonstrated. The results reveal the negative effect on the output voltage caused by the parasitic capacitances of the insulation layers. The design guidelines for the devices using series-connected piezoelectric elements are explained.

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Section: Discussionsupporting

confidence: 70%

Section: Introductionmentioning

confidence: 96%

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Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Kanda

Saito

Iga

et al. 2012

Sensors

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“…The conditions for the sputtering and etching processes were reported previously. 31) A photosensitive epoxy polymer, SU-8 (MicroCHEM), is spin-coated onto the wafer. The beam structure is formed via a photolithography process.…”

Section: Fabricationmentioning

confidence: 99%

Piezoelectric MEMS with tactile stimulation and displacement sensing functions

Kanda¹,

Takahara²,

Toyama³

et al. 2018

Jpn. J. Appl. Phys.

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For the application of bidirectional communication between a human activity monitoring system and a human using tactile sensation, a tactile MEMS device is developed. To obtain the displacement and provide energy to the human skin, a driving actuator and a displacement sensor are integrated. The tactile device is based on a cantilever with a lamination structure of polymer and Pb(Zr,Ti)O3 thin films. The characterization of the device showed that the sensor output agreed well with the tip displacement. For the touch experiment of the device, the frequency response demonstrates hardening-spring-like behavior. By using a piecewise linear system model, the behavior is analyzed. The experimental results and analytical model showed similar tendencies. These results indicate a potential application of the stiffness sensor of an object.

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“…14) We have also addressed the fabrication process 15) for PZT-MEMS and developed several devices. [16][17][18] On the other hands, bulk bimorph bending actuators made of sintered ceramics are commercially available and one of the solutions to obtaining a large deflection. Two piezoelectric layers are poled in the same direction and electrically connected in parallel, as shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O₃Thin Films for Micro-Electromechanical Systems

Kanda

Inoue

Saito

et al. 2012

Jpn. J. Appl. Phys.

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In this paper, we address the fabrication and characterization of bimorph structures with relatively thick double-layered Pb(Zr,Ti)O3 (PZT) thin films. The PZT/PZT layers are deposited by RF magnetron sputtering. Hysteresis loops of polarization and electrical field for the top and bottom PZT thin films revealed good ferroelectric characteristics with remanent polarization at approximately 20 µC/cm2 and a coersive electric field of about 100 kV/cm. The vibration tests of fabricated bimorph cantilevers during electrical voltage application revealed a twofold displacement compared with single layer driving, and the piezoelectric coefficient value d 31 is estimated to be 13 pm/V. The residual stress difference between the top and bottom layers after the annealing process is calculated to be -0.32 MPa. For a further thickening of the bimorph structure, 6-µm-thick PZT/PZT is also sputtered. The thicker bimorph has a smaller residual stress difference, -30 MPa, between the two layers prepared without the annealing process. The evaluated results demonstrate that the PZT/PZT bimorph structures are applicable to micro-electromechanical systems (MEMS) devices.

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Multiplication of Sensor Output Voltage Using Series-Connected Piezoelectric Elements

Cited by 14 publications

References 13 publications

Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Piezoelectric MEMS with tactile stimulation and displacement sensing functions

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O₃Thin Films for Micro-Electromechanical Systems

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Multiplication of Sensor Output Voltage Using Series-Connected Piezoelectric Elements

Cited by 14 publications

References 13 publications

Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Piezoelectric MEMS with tactile stimulation and displacement sensing functions

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O3Thin Films for Micro-Electromechanical Systems

Contact Info

Product

Resources

About

Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O₃Thin Films for Micro-Electromechanical Systems