2010
DOI: 10.1541/ieejsmas.130.124
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Multiplication of Sensor Output Voltage Using Series-Connected Piezoelectric Elements

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Cited by 14 publications
(6 citation statements)
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“…Since the charge source is not included in the standard SPICE library, the simplest model of a piezoelectric capacitance with initial voltage is proposed. In addition, the calculation using the SPICE model has been consistent with the experimental output voltage for the series-connected 8 piezoelectric elements in the previous work [14] (the focus has the multiplication of output voltage and the description of SPICE model in detail has not been indicated in the reference).…”
Section: Discussionsupporting
confidence: 70%
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“…Since the charge source is not included in the standard SPICE library, the simplest model of a piezoelectric capacitance with initial voltage is proposed. In addition, the calculation using the SPICE model has been consistent with the experimental output voltage for the series-connected 8 piezoelectric elements in the previous work [14] (the focus has the multiplication of output voltage and the description of SPICE model in detail has not been indicated in the reference).…”
Section: Discussionsupporting
confidence: 70%
“…, tensile and compressive stresses), as shown in Figure 1(b). We have experimentally verified the output-voltage multiplication and cancelation [14,15]. However, output voltages reach a limit as an increasing number of elements are connected, resulting from the parasitic capacitance formed by the insulation layer underneath the bottom electrodes, as shown in Figure 2.…”
Section: Introductionmentioning
confidence: 96%
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“…The conditions for the sputtering and etching processes were reported previously. 31) A photosensitive epoxy polymer, SU-8 (MicroCHEM), is spin-coated onto the wafer. The beam structure is formed via a photolithography process.…”
Section: Fabricationmentioning
confidence: 99%
“…14) We have also addressed the fabrication process 15) for PZT-MEMS and developed several devices. [16][17][18] On the other hands, bulk bimorph bending actuators made of sintered ceramics are commercially available and one of the solutions to obtaining a large deflection. Two piezoelectric layers are poled in the same direction and electrically connected in parallel, as shown in Fig.…”
Section: Introductionmentioning
confidence: 99%