Multiphysics Modeling of BAW Filters

Tag, Andreas; Chauhan, Vikrant; Weigel, Robert; Hagelauer, Amelie; Bader, B.; Huck, Christian; Pitschi, M.; Karolewski, Dominik

doi:10.1109/ultsym.2015.0115

Cited by 8 publications

(2 citation statements)

References 12 publications

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“…The "G-S-G" signal ports on the left and right sides of the filter indicate the input and output of the RF signal. Combining the simulation results of the Mason model with those of the electromagnetic model enables the realization of acoustic-electromagnetic co-simulation [6,32,33].…”

Section: Design and Fabricationmentioning

confidence: 99%

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Gao,

Zheng,

et al. 2024

Sensors

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Film bulk acoustic-wave resonators (FBARs) are widely utilized in the field of radio frequency (RF) filters due to their excellent performance, such as high operation frequency and high quality. In this paper, we present the design, fabrication, and characterization of an FBAR filter for the 3.0 GHz–3.2 GHz S-band. Using a scandium-doped aluminum nitride (Sc0.2Al0.8N) film, the filter is designed through a combined acoustic–electromagnetic simulation method, and the FBAR and filter are fabricated using an eight-step lithographic process. The measured FBAR presents an effective electromechanical coupling coefficient (keff2) value up to 13.3%, and the measured filter demonstrates a −3 dB bandwidth of 115 MHz (from 3.013 GHz to 3.128 GHz), a low insertion loss of −2.4 dB, and good out-of-band rejection of −30 dB. The measured 1 dB compression point of the fabricated filter is 30.5 dBm, and the first series resonator burns out first as the input power increases. This work paves the way for research on high-power RF filters in mobile communication.

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Section: Design and Fabricationmentioning

confidence: 99%

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Gao,

Zheng,

et al. 2024

Sensors

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“…In recent years, many researchers have made contributions to EM-centric multiphysics modeling methods [7][8][9]. An accurate and efficient multiphysics modeling method for BAW filters at high power levels is proposed in [10]. In [11], researchers quantify the temperature drift of microwave filters by a multiphysics coupling analysis approach.…”

Section: Introductionmentioning

confidence: 99%

A Novel Electromagnetic Centric Multiphysics Parametric Modeling Approach Using Neuro-Space Mapping for Microwave Passive Components

et al. 2022

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An advanced Neuro-space mapping (Neuro-SM) multiphysics parametric modeling approach for microwave passive components is proposed in this paper. The electromagnetic (EM) domain model, which represents the EM responses with respect to geometrical parameters, is regarded as a coarse model. The multiphysics domain model, which represents the multiphysics responses with respect to both geometrical parameters and multiphysics parameters, is regarded as a fine model. The proposed model is constructed by the input mapping, the output mapping and the coarse model. The input mapping is used to map multiphysics parameters to EM parameters. The output mapping is introduced to further narrow the gap between the output of the coarse model and the multiphysics data. In addition, a three-stage training method is proposed for efficiently developing the proposed multiphysics model. The proposed technique, which combines the efficiency of EM analysis and the accuracy of multiphysics analysis, can achieve better accuracy with less multiphysics data than existing modeling methods. The developed Neuro-SM multiphysics model provides accurate and fast predictions of multiphysics responses. Therefore, the design cycle of microwave passive components is shortened while the modeling cost is significantly reduced. Two microwave filter examples are utilized to demonstrate the accuracy of the proposed parametric modeling technique.

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Nonlinear behavior of RF Bulk Acoustic Wave cascaded components at high input power

Chauhan

Mayer

Schiek

et al. 2016

2016 Asia-Pacific Microwave Conference (APMC)

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Multiphysics Modeling of BAW Filters

Cited by 8 publications

References 12 publications

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

A Novel Electromagnetic Centric Multiphysics Parametric Modeling Approach Using Neuro-Space Mapping for Microwave Passive Components

Nonlinear behavior of RF Bulk Acoustic Wave cascaded components at high input power

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