Multiparametric Porous Silicon Sensors

Abstract

Abstract:We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conductance, the photoluminescence intensity, and the wavelength of the optical resonance. We monitored the change of these three parameters as a function of NO 2 (0.5-5 ppm), ethanol (300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the examined species affect the parameters in a different way, both as a relative change and as dynamic.

Unconventional ratiometric-enhanced optical sensing of oxygen by mixed-phase TiO2

“…[13][14][15][16][17][18][19][20][21][22][23] Unfortunately, approaches based on intensity measurement of the PL emission are also prone to errors. In particular, fluctuations in the excitation light intensity can hinder the understanding of the experimental data when real-time monitoring is performed and small integration times in the PL measurement have to be used.…”

Gas Analisis System Based on the Porous Silicon Structures

“…Одним з перспективних матеріалів для сен-сорів є поруватий кремній (ПК) [1][2][3]. Елек-трохімічний метод виготовлення ПК дає змогу контрольовано змінювати структурні пара-метри поруватого шару в широких межах [4,5].…”

Gas Adsorption Sensors on the Basis of Porous Silicon

“…Ìàë³ ðîçì³ðè êðåìí³ºâèõ êðèñòàë³â ³ âåëèêà çàãàëüíà ïëîùà ¿õ ïîâåðõí³ çóìîâëþº çíà÷íó ÷óòëèâ³ñòü âëàñ-òèâîñòåé øàð³â ÏÊ äî çîâí³øíüîãî ñåðåäîâèùà [1]. Çîêðåìà, øèðîêî äîñë³äaeóþòüñÿ àäñîðá-ö³éí³ ñåíñîðè íà îñíîâ³ ÏÊ, ðîáîòà ÿêèõ áàçó-ºòüñÿ íà çì³í³ ïðîâ³äíîñò³ òà ºìíîñò³ ìàòåð³àëó [2,3]. Íàÿâí³ñòü íà ïîâåðõí³ ÏÊ êàòàë³òè÷íîãî ìàòåð³àëó (íàïðèêëàä, ïàëàä³é àáî äåÿê³ ïðî-â³äí³ ïîë³ìåðè) ìîaeå ñïðèÿòè ï³äâèùåííþ ÷óòëèâîñò³ òà ñåëåêòèâíîñò³ òàêèõ ñåíñîð³â [4].…”