Gas Adsorption Sensors on the Basis of Porous Silicon

Abstract

Àíîòàö³ÿ. Âèâ÷åíî âïëèâ àäñîðáö³¿ âîäíþ òà ìåòàíó íà âèñîêî÷àñòîòíó (1 ÌÃö) ïðîâ³äí³ñòü ³ ºìí³ñòü ñåíñîðíèõ ñòðóêòóð íà îñíîâ³ ïîðóâàòîãî êðåìí³þ. Çàðåºñòðîâàíî ñóòòºâó çì³íó åëåêòðè÷íèõ ïàðàìåòð³â â çàëåaeíîñò³ â³ä ïàðö³àëüíîãî òèñêó ãàç³â. Ðîçðàõîâàíî àäñîðáö³éíó ÷óòëèâ³ñòü ñòðóêòóð íà îñíîâ³ ïîðóâàòîãî êðåìí³þ òà áàãàòîøàðîâèõ ñòðóêòóð ç ïë³âêîþ êà-òàë³òè÷íîãî ìàòåð³àëó. Ïîêàçàíî, ùî ñåëåêòèâí³ñòü ñåíñîð³â äî âîäíþ àáî ìåòàíó ìîaeíà ïî-êðàùèòè øëÿõîì íàíåñåííÿ íà ïîâåðõíþ ïîðóâàòîãî êðåìí³þ êàòàë³òè÷íî¿ ïë³âêè ïàëàä³þ àáî ïîë³åïîêñ³ïðîï³ëêàðáàçîëó. Âèÿâëåíî ïîì³òíó ÷óòëèâ³ñòü ñïåêòð³â ôîòîëþì³íåñöåíö³¿ ïîðóâàòîãî êðåìí³þ äî àäñîðáö³¿ ìîëåêóë àì³àêó òà åòàíîëó. Îòðèìàí³ ðåçóëüòàòè äîçâîëÿþòü îïòèì³çóâàòè ïðîöåñè ôîðìóâàííÿ ñåëåêòèâíèõ ñåíñîð³â ãàçó íà îñíîâ³ ïîðóâàòîãî êðåìí³þ.Êëþ÷îâ³ ñëîâà: ïîðóâàòèé êðåìí³é, ñåíñîðè, àäñîðáö³ÿ, àäñîðáö³éíà ÷óòëèâ³ñòü, ïðîâ³ä-í³ñòü, åëåêòðè÷íà ºìí³ñòü, ôîòîëþì³íåñöåíö³ÿ GAS ADSORPTION SENSORS ON THE BASIS OF POROUS SILICON L. S. Monastyrskii, I. B. Olenych, O. I. Aksimentyeva, B. S. Sokolovskii, M. R. PavlykAbstract. The influence of hydrogen and methane adsorption on high frequency (1 MHz) conductivity and capacity of sensor structures based on porous silicon has been studied. An essential changing in electric parameters was registered as a function of partial gas pressure. It was calculated the adsorption sensitivity of porous silicon and multilayer structures with catalytic films. Sensor selectivity to hydrogen and methane may be improved by deposition on porous silicon surface the catalytic films of palladium or poly(epoxypropylcarbazole). It observed a marked sensitivity of porous silicon photoluminescence to adsorption of ammonia and ethanol. The obtained results make it possible to optimize the fabrication of selective sensors based on porous silicon.