Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor

Sohgawa, Masayuki; Nozawa, Akito; Yokoyama, Hokuto; Kanashima, Takeshi; Okuyama, Masanori; Abe, Takashi; Noma, Hiroyasu; Azuma, Teruaki

doi:10.1109/icsens.2014.6985362

Cited by 18 publications

(10 citation statements)

References 7 publications

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“…Because the interdigitated array electrode is electrically connected to the Si layer via capacitance of Si 3 N 4 insulation layer as AC circuit shown in Figure 1, the impedance of the electrode decreases with increase of the light intensity. Thus, the light intensity can be detected as decrease of the impedance of the electrode [16]. In previous works, the light is detected as impedance between wiring electrodes [16,17].…”

Section: Design and Fabrication Of Tactile Sensormentioning

confidence: 99%

“…In our previous works, single element proximity and tactile combined sensor fabricated by micromachining process for manipulation control not only in the manufacturing industries but also in various fields has been developed [16]. In this sensor, normal and shear loads can be obtained distinctively using this sensor with three cantilevers embedded in PDMS elastomer by measurement of sensitivities to each axis load in advance.…”

Section: Introductionmentioning

confidence: 99%

“…However, the detection part of this sensor is comparatively large at 290 × 200 μm in length and width, respectively, thus it is difficult to place the detection part with high density for detection similar to spatial acuity of tactile receptors (0.5 mm for Merkel cells [4]) of humans, and detection of normal and shear force distribution at micro scale have limitations. In addition, for proximity sensing, a LED separate from the sensor serving as a probe light source is needed [16], however, it brings increase of mounting area and the shadowing effect in detection just before contact. To decrease mounting area and prevent shadowing, a smaller LED chip with lower light intensity will be mounted on surface of the sensor, thus, light sensitivity of the sensor should be improved.…”

Section: Introductionmentioning

confidence: 99%

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Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control

et al. 2018

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In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized microcantilevers one-fifth the size of previous one as the detection part was newly developed. Microcantilevers were arranged with higher spatial density than in previous works and an interdigitated array electrode to enhance light sensitivity was added. It is found that the interdigitated array electrode can detect light with 1.6 times higher sensitivity than that in previous works and the newly fabricated microcantilevers have enough sensitivity to applied normal and shear loads. Therefore, more accurate detection of proximity distance and spatial distribution of contact force become available for dexterous gripping control to prevent ‘overshooting’, ‘force control error’, and ‘slipping’.

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Section: Design and Fabrication Of Tactile Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control

et al. 2018

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“…Figure 3(a) shows the relative AC impedance change of a Si layer at 5 MHz, which is the maximum measurement frequency of the LCR meter, because sensitivity of the impedance to light becomes larger at higher frequency (8) as a function of illuminance of the white LED (LK-1WH-6, ELEKIT) light. The AC impedance between electrodes decreases with increasing current carrier density in the upper part of the Si layer of the SOI wafer based on the photoconductive effect.…”

Section: Principle Of Visual Sensingmentioning

confidence: 99%

“…(7) Moreover, this tactile sensor has a light sensing function as an impedance change of the Si substrate because of the photoconductive effect. (8) We have already proposed a measurement method for the visual and tactile textures of an object using this sensor. (9) As mentioned in Ref.…”

Section: Introductionmentioning

confidence: 99%

Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor

2017

Sensors and Materials

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In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

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Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance

Takahashi

Abe

et al. 2022

Elect Comm in Japan

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This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilevertype MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.

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Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor

Cited by 18 publications

References 7 publications

Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control

Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control

Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor

Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance

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