Multilayered Structure as a Novel Material for Surface Acoustic Wave Devices: Physical Insight

Orientations of langasite (LGS) with Euler angles (0°, μ, 90°) are potentially useful for applications in wireless SAW sensors because of wide variation of their temperature coefficient of frequency (TCF), between -50 and +50 ppm/°C, combined with high values of electromechanical coupling coefficient, especially if thick electrodes are utilized. The nature and characteristics of shear-horizontally polarized SAWs (SHSAWs) propagating in these orientations are investigated using a combination of numerical techniques: analysis of the BAW slowness surface and its effect on the SH-SAW structure; visualization of displacements that follow wave propagation in the grating; calculation of admittance of infinite periodic gratings; and analysis of SAW dispersion in the gratings, including possible interaction between SH-SAWs and parasitic Rayleigh SAWs. The characteristics of SH-SAWs propagating in symmetric cuts (velocities, localization depth, electromechanical coupling, etc.) are supplemented by analysis of propagation directions deviating from the YZ-plane toward the x-axis of LGS, for the temperature compensated cut with Euler angles (0°, 22°, 90°) and one more orientation for comparison. This extended analysis reveals that in actual devices, the anisotropy may be a reason for strong interaction between SH-SAWs and parasitic Rayleigh SAWs and cause degradation of the device's performance.

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Temperature compensated AlN/SiO<inf>2</inf> structures for Lamb wave resonators

Naumenko

2012

2012 IEEE International Ultrasonics Symposium

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Multilayered Structure as a Novel Material for Surface Acoustic Wave Devices: Physical Insight

Cited by 3 publications

References 37 publications

Advanced bulk and thin film materials for harsh environment MEMS applications

Advanced bulk and thin film materials for harsh environment MEMS applications

Effect of anisotropy on characteristics and behavior of shear horizontal SAWs in resonators using langasite

Temperature compensated AlN/SiO<inf>2</inf> structures for Lamb wave resonators

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