Advanced bulk and thin film materials for harsh environment MEMS applications

Caliendo, Cinzia; Castro, Fabio Lo

doi:10.1016/b978-0-85709-211-3.00017-0

Cited by 2 publications

(2 citation statements)

References 114 publications

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“…In harsh environment applications (such as high temperature or corrosive environments), the metal used to fabricate the IDTs should exhibit a high electrical conductivity, high melting temperature, a good resistance to oxidation and chemical inertness. Iridium, rhodium and platinum are a few examples of metals suitable for harsh environment applications [23][24][25][26].…”

Section: Pseudo Saw and High Velocity Psaw Sensorsmentioning

confidence: 99%

Guided acoustic wave sensors for liquid environments

Caliendo

Hamidullah

2019

J. Phys. D: Appl. Phys.

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Surface acoustic wave (SAW) based sensors for applications to gaseous environments have been widely investigated since the last 1970s. More recently, the SAW-based sensors focus has shifted towards liquid-phase sensing applications: the SAW sensor contacts directly the solution to be tested and can be utilized for characterizing physical and chemical properties of liquids, as well as for biochemical sensor applications. The design of liquid phase sensors requires the selection of several parameters, such as the acoustic wave polarizations (i.e., elliptical, longitudinal and shear horizontal), the wave-guiding medium composition (i.e., homogeneous or non-homogeneous half-spaces, finite thickness plates or composite suspended membranes), the substrate material type and its crystallographic orientation. The paper provides an overview of different types of SAW sensors suitable for application to liquid environments, and intents to direct the attention of the designers to combinations of materials, waves nature and electrode structures that affect the sensor performances. ORCID iDsC Caliendo https://orcid.org/0000-0002-8363-2972 M Hamidullah https://orcid.org/0000-0003-2131-4335

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Section: Pseudo Saw and High Velocity Psaw Sensorsmentioning

confidence: 99%

Guided acoustic wave sensors for liquid environments

Caliendo

Hamidullah

2019

J. Phys. D: Appl. Phys.

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“…Piezoelectric wurtzite ZnO thin film technology has been widely used for many years for the fabrication of surface acoustic wave (SAW) devices onto non piezoelectric substrates, such as silicon, glass, and sapphire, to name just a few. When the piezoelectric ZnO film is grown onto high-velocity materials, such as diamond or SiC, it is a promising candidate for high frequency, high sensitivity micro sensors [ 18 ]. The aim of the present theoretical calculations is to investigate the influence of the thickness of both ZnO and a-SiC layers on the performances of a Lamb wave device for liquid sensing applications.…”

Section: Introductionmentioning

confidence: 99%

Amorphous SiC/c-ZnO-Based Quasi-Lamb Mode Sensor for Liquid Environments

Caliendo

Hamidullah

Laidoudi

2017

Sensors

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The propagation of the quasi-Lamb modes along a-SiC/ZnO thin composite plates was modeled and analysed with the aim to design a sensor able to detect the changes in parameters of a liquid environment, such as added mass and viscosity changes. The modes propagation was modeled by numerically solving the system of coupled electro-mechanical field equations in three media. The mode shape, the power flow, the phase velocity, and the electroacoustic coupling efficiency (K2) of the modes were calculated, specifically addressing the design of enhanced-coupling, microwave frequency sensors for applications in probing the solid/liquid interface. Three modes were identified that have predominant longitudinal polarization, high phase velocity, and quite good K2: the fundamental quasi symmetric mode (qS0) and two higher order quasi-longitudinal modes (qL1 and qL2) with a dominantly longitudinal displacement component in one plate side. The velocity and attenuation of these modes were calculated for different liquid viscosities and added mass, and the gravimetric and viscosity sensitivities of both the phase velocity and attenuation were theoretically calculated. The present study highlights the feasibility of the a-SiC/ZnO acoustic waveguides for the development of high-frequency, integrated-circuit compatible electroacoustic devices suitable for working in a liquid environment.

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Advanced bulk and thin film materials for harsh environment MEMS applications

Cited by 2 publications

References 114 publications

Guided acoustic wave sensors for liquid environments

Guided acoustic wave sensors for liquid environments

Amorphous SiC/c-ZnO-Based Quasi-Lamb Mode Sensor for Liquid Environments

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