2005
DOI: 10.1063/1.1938867
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Multilayer coating for 30.4nm

Abstract: A multilayer coating of Mo∕Si is usually used for space science in the spectral range of extreme ultraviolet, especially for He-II (30.4nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15%–20% is achieved. But the space science community needs a higher reflective coating at 30.4nm for the future satellite missions. In this work, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance.

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Cited by 31 publications
(4 citation statements)
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“…SiC/Mg MISs attract research interest owing to a unique combination of high reflectance (more than 40% [44,45]), fine spectral selectivity, thermal stability (up to 350 • C), and almost zero stress [45][46][47][48].…”
Section: Selection Of Mis Materialsmentioning
confidence: 99%
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“…SiC/Mg MISs attract research interest owing to a unique combination of high reflectance (more than 40% [44,45]), fine spectral selectivity, thermal stability (up to 350 • C), and almost zero stress [45][46][47][48].…”
Section: Selection Of Mis Materialsmentioning
confidence: 99%
“…The extension of sensitivity to E ∼ 200 keV is of particular interest, since several key nuclear transitions of radioactive elements produced in supernova explosions lie between 50 and 200 keV. For example, decays of 44 Ti (68 and 78 keV) and 56 Ni (158 keV) are of interest, since the production and ejection of 44 Ti are sensitive to the explosion mechanism, and the temporal evolution of intensity of the 56 Ni line is sensitive to the structure and dynamics of ejection [147].…”
Section: Telescopes Based On Gradient Missmentioning
confidence: 99%
“…Different Mg based MLs have been investigated, including Mg/Co, Mg/C, Mg/B 4 C, Mg/Si and Mg/SiC. [101][102][103][104] Among those, Mg/SiC is one of the most promising because its theoretical reflectance approaches 60% at 30.4 nm, with a spectral band of only 1.4 nm: in fact, in the 26-35 nm wavelength range, Mg/SiC structure gives higher reflectance and narrower bandpass than both the standard Mo/Si and any other material pair. Furthermore, Mg/SiC shows also a natively nearzero stress and a high thermal stability up to 350 C, definitely making this structure superior of any other material pairs in the >25 nm wavelength region.…”
Section: Mg-based Euv ML Structuresmentioning
confidence: 99%
“…This makes Mg a promising material for filters and multilayer coatings in energies below the L 3 edge. In fact, several groups have recently developed multilayers based on Mg. [1][2][3][4][5][6][7] The EUV properties of Mg films have been investigated by several authors. Sabine 8 measured the reflectivity of magnesium films evaporated over a film of chromium in the 2.6-31.0 eV energy range.…”
Section: Introductionmentioning
confidence: 99%