Multilayer Al2O3/TiO2 Atomic Layer Deposition coatings for the corrosion protection of stainless steel

Marin, Elia; Guzmàn, L.; Lanzutti, A.; Ensinger, Wolfgang; Fedrizzi, L.

doi:10.1016/j.tsf.2012.08.023

Cited by 105 publications

(72 citation statements)

References 31 publications

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“…The obtained results confirm the findings of e. Marin and C. X. Shan [12,15,16]. They have also found advantageous effect of TiO 2 layers on improvement of corrosion resistance of austenic steel as compared with the material in the initial state.…”

Section: Discussionsupporting

confidence: 89%

Potentiostatic, Potentiodynamic and Impedance Study of TiO2 Layers Deposited of 316 LVM Steel Used for Coronary Stents

Basiaga¹,

Staszuk²,

Walke³

et al. 2016

Archives of Metallurgy and Materials

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The objective of the study is assessment of suitability of the ALD method for application of a TiO2 layer on surface of 316LVM steel used for production of vessel stents. Selection of the appropriate process parameters for application of the layer affects its electrochemical properties, which largely determine resistance of the biomaterial to corrosion in the blood environment, thus affecting its hemocompatibility. To assess resistance of the AISI 316LVM steel with modified surface to corrosion, voltammetric and impedance measurements were conducted. The proposed variant of surface processing allows safe deformation of the TiO2 layer without its delamination.

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Section: Discussionsupporting

confidence: 89%

Potentiostatic, Potentiodynamic and Impedance Study of TiO2 Layers Deposited of 316 LVM Steel Used for Coronary Stents

Basiaga¹,

Staszuk²,

Walke³

et al. 2016

Archives of Metallurgy and Materials

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“…35,36,37,38,39 They have been reported to adhere to substrates better than some reference films. 40,41 Better corrosion resistance 41,42,43,44 and thermal stability 45,46 have also been reported for nanolaminates.…”

Section: Fig 1 (Color Online)mentioning

confidence: 89%

“…49 Mechanical properties such as elastic modulus and hardness has been studied as a function of bilayer thickness using nanoindentation for films grown at 200 °C 39 and elastic modulus by bulge and shaft loading test. 49 The Al2O3 / TiO2 nanolaminate adhesion has been studied by indentation on stainless steel substrate, 41,40 and for reference ALD Al2O3 and ALD TiO2 materials on silicon 50 and on polymeric substrate. 51 Since there is no systematic data on residual stress, adhesion and mechanical properties of Al2O3 / TiO2…”

Section: Fig 1 (Color Online)mentioning

confidence: 99%

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Ylivaara¹,

Kilpi²,

Liu

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Atomic layer deposition (ALD) is based on self-limiting surface reactions. This and cyclic process enable the growth of conformal thin films with precise thickness control and sharp interfaces. A multilayered thin film, which is nanolaminate, can be grown using ALD with tuneable electrical and optical properties to be exploited, for example, in the microelectromechanical systems. In this work, the tunability of the residual stress, adhesion, and mechanical properties of the ALD nanolaminates composed of aluminum oxide (Al2O3) and titanium dioxide (TiO2) films on silicon were explored as a function of growth temperature (110–300 °C), film thickness (20–300 nm), bilayer thickness (0.1–100 nm), and TiO2 content (0%–100%). Al2O3 was grown from Me3Al and H2O, and TiO2 from TiCl4 and H2O. According to wafer curvature measurements, Al2O3/TiO2 nanolaminates were under tensile stress; bilayer thickness and growth temperature were the major parameters affecting the stress; the residual stress decreased with increasing bilayer thickness and ALD temperature. Hardness increased with increasing ALD temperature and decreased with increasing TiO2 fraction. Contact modulus remained approximately stable. The adhesion of the nanolaminate film was good on silicon.

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“…The layers deposited by ALD also increased the corrosion resistance of steel by reducing the corrosion current, and increasing the passive areas. 12 In the literature, little space is devoted to layers of Al 2 O 3 , which could also have a major impact on improving the physicochemical properties of metallic biomaterials. Therefore, the aim of the completed research was to determine the influence of an Al 2 O 3 layer formed by the ALD method on the physicochemical properties of metallic biomaterials.…”

Section: Introductionmentioning

confidence: 99%

Comparison of the physicochemical properties of Al2O3 layers applied to the surfaces of cpTi and the Ti6Al7Nb alloy using the ALD method

Basiaga¹,

Staszuk²,

Tański³

et al. 2017

Mater. Tehnol.

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Literature data show that atomic-layer deposition (ALD) is a very important method for depositing layers due to the mechanical and physicochemical properties of the surface. In the literature, little space is devoted to layers of Al2O3, which could also have a major impact on improving the physicochemical properties of metallic biomaterials. Therefore, the aim of this research was to determine the influence of the Al2O3 layer formed by the ALD method on the physicochemical properties of metallic biomaterials. Based on the results, a beneficial effect on the pitting and crevice-corrosion resistance of the applied Al2O3 layer was determined, compared to the initial state, devoid of the layer, regardless of the substrate used. On the other hand, the performed surface-wettability tests showed no influence of the ALD temperature on the obtained angle values. Proposing appropriate conditions for the surface treatment using the ALD method has some promise and will contribute to the development of a technological process with defined parameters for oxide-layer manufacture for implants used in bone surgery. Keywords: cpTi (Grade 4), Ti6Al7Nb alloy, Al 2 O 3 layer, adhesion, corrosion resistance Podatki iz literature ka`ejo, da je depozicija atomskih plasti (ALD) zelo pomembna metoda za nana{anje plasti zaradi mehanskih in fizikalno-kemijskih lastnosti povr{ine. V literaturi so plasti Al2O3 sicer le malo omenjene pa vendar imajo lahko velik vpliv na izbolj{anje fizikalno-kemijskih lastnosti kovinskih biomaterialov. Cilj raziskave je bil zato ugotoviti vpliv Al2O3 sloja, tvorjenega z metodo ALD, na fizikalno-kemijske lastnosti kovinskih biomaterialov. Na osnovi rezultatov smo dolo~ili ugoden u~inek uporabljene Al2O3 plasti pri odpornosti na luknji~asto in {pranjsko korozijo, v primerjavi z za~etnim stanjem, ki je bila brez sloja, ne glede na uporabljeno podlago. Po drugi strani pa so izvedeni testi povr{inske vpojnosti pokazali, da temperatura ALD-metode ne vpliva na dobljene kotne vrednosti. Ustrezni pogoji, predlagani za povr{insko obdelavo z uporabo ALD-metode, veliko obetajo in bodo prispevali k razvoju tehnolo{kega procesa z dolo~enimi parametri za izdelavo vsadkov, ki se uporabljajo v kirur{ki medicini in pri operacijah kosti. Klju~ne besede: cpTi (Grade 4), Ti6Al7Nb zlitina, Al2O3 plast, oprijem, odpornost proti koroziji

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Multilayer Al2O3/TiO2 Atomic Layer Deposition coatings for the corrosion protection of stainless steel

Cited by 105 publications

References 31 publications

Potentiostatic, Potentiodynamic and Impedance Study of TiO2 Layers Deposited of 316 LVM Steel Used for Coronary Stents

Potentiostatic, Potentiodynamic and Impedance Study of TiO2 Layers Deposited of 316 LVM Steel Used for Coronary Stents

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Comparison of the physicochemical properties of Al2O3 layers applied to the surfaces of cpTi and the Ti6Al7Nb alloy using the ALD method

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