Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

Abstract

An interferometer-based metrological scanning probe microscope (SPM) is successfully integrated into our nanopositioning and nanomeasuring machine (NPM machine) for high-precision measurements with nanometre uncertainty over a range of 25 mm × 25 mm × 5 mm. Both devices were developed at the Institute of Process Measurement and Sensor Technology of Ilmenau University of Technology, Germany. Outstanding results were achieved for different measurement tasks. With the NPM machine, truly long-range and long-term measurements are possible. Due to the tip wear, an automatic SPM cantilever replacement is preferable. Such a tip replacement is also required for the integration of multifunctional nanoanalytics. For example, for Kelvin probe force microscopy (KPFM), the measurement of topography and surface potential with different SPM tips is necessary. For this purpose, an electromagnetic tip changer was designed. The tip changer comprises three SPM probes. In order to retrieve the previous tip positions, additional fiducial marks were developed. The repeatability of relocation is less than 10 nm. The automatic tip changer and fiducial marks are integrated into a sample holder. The tip changer in combination with fiducial marks allows scanning distances three times longer (with the same type of SPM probes) and multifunctional nanoanalytics (with different SPM probes with special properties). Sample KPFM measurements are demonstrated. The developed tip changer, including special fiducial marks, improves the performance and functionality of the NPM machine crucially.

Electronic structure investigation of Al0.7Ga0.3As/GaAs nanometric heterostructures by Kelvin force microscopy

“…In Fig. 2(b 2 ) all the doublet layers indexed from P 1 to P 8 and separated layers indexed W 8 , W 10 are detected which is in agreement with the work of N. Vorbringer-Dorozhovets et al 16 To check the best spatial resolution that our instrument is able to achieve we switch to the sample region presented in the Fig. 1(a 2 ).…”

“…1 Electrical measurements were already performed using KFM system under ambient conditions. 16 The KFM spatial resolution of this system was found to be 10 nm. Here, we analyze the origin of KFM resolution limit on BAM-L200 sample under Ultra-High Vacuum (UHV), and to our knowledge, such origin was never analyzed on AlGaAs/GaAs structure.…”

Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision

“…The basic approach of the implementation of an error-minimal measuring concept-the so-called Abbe's principle-for all three measuring axes was described [2] followed by many recent developments and applications [9][10][11][12][13][14]. In contrast to other micro-/ nanoCMM [15][16][17], in the NPMM, a mechatronic control engineering approach is pursued from the outset.…”

A review of interferometry for geometric measurement

“…Another illustration is shown in figure 25; if a WLI microscope is integrated into NPM machines [256], the measuring range will extend up to 5 mm, and that means the requirements of both high measurement resolution and relatively large measuring range are met simultaneously. A multifunctional nanoanalytics and longrange SPM using the NPM machine was reported [257], and a high precision measurement with nanometer uncertainty over a range of 25 mm × 25 mm × 5 mm was realized.…”