Multifunctional metamaterial pyroelectric infrared detectors

Suen, Jonathan Y.; Fan, Kebin; Montoya, John; Bingham, Chris; Stenger, Vincent; Sriram, Sharath; Padilla, Willie J.

doi:10.1364/optica.4.000276

Cited by 117 publications

(69 citation statements)

References 16 publications

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“…Thus, the device transmission can switch between two spectrally separate M‐IR bands. The active transmission control and dynamic band‐selectivity in the structure represents a distinct advantage over the current passive infrared plasmonic filters . Figure d shows the complex refractive index of a 65 nm thick monolithic GST film on a Si substrate for both the amorphous (blue line) and face‐centered cubic (FCC) crystalline (red line) states.…”

Section: Resultsmentioning

confidence: 99%

Tunable Mid‐Infrared Phase‐Change Metasurface

Dong

Qiu

Zhou

et al. 2018

Advanced Optical Materials

126

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reduce the size of these sensors, [4][5][6][7][8][9][10][11][12] since it exhibits a unique surface condition with tailored spectral properties and strong electric field enhancement, which results in a high sensitivity to the surroundings. [13][14][15][16][17][18][19][20][21] To date, most approaches toward metamaterial inspired sensors are based on perfect light absorption. [17,19,22,23] However, the measurement of their reflectance makes both optical alignment and chip integration challenging. [24] Furthermore, metamaterial sensors that are designed for the M-IR are rarely discussed because robust sources, detectors, and efficient components are limited. [25] In addition, despite metamaterial sensors exhibiting excellent sensitivity at their designed frequency, demonstrations of wideband or frequency-swept detection are uncommon. This is because the metamaterial optical response is usually fixed by its dimensions and dielectric properties. [26] Consequently, measurements at different wavelengths using a single metamaterial device are impossible. Recently, metamaterials that are tuned by integrating graphene, [27] vanadium dioxide, [28] liquid crystals, [29] and metal hydrides [30] were investigated. Particularly, the graphene [27] and vanadium dioxide [28] based metasurfaces are promising for dynamically tuning plasmonic induced transparency.Note, these tuning mechanisms tend to be impractical in the M-IR region because the materials involved have a strong Drude contribution to the dielectric function. The M-IR region is, however, an important spectral band where there exists an atmospheric transparency window and molecular vibrational fingerprints. [31][32][33] Chalcogenide phase change materials (PCMs) have a remarkable portfolio of properties. [34][35][36] In particular, unlike silica glasses, the low phonon energies of chalcogenides allow them to be transparent in the M-IR. [37] The fast switching between two structural states of the phase change data storage material, Ge 2 Sb 2 Te 5 (GST), make it ideal for active photonic devices. [34,[38][39][40][41][42][43][44][45][46][47][48] Notably, in the M-IR region GST exhibits a pronounced contrast in the real part of the permittivity (ε r ), and a negligibly small ratio of the imaginary (ε i ) to the ε r , indicating low absorptive losses. [49,50] In addition, it is now possible to design the nanostructure of GST to achieve specific switching characteristics. [51,52] Thus, there is evidence that chalcogenide PCMs can enable practical spectroscopically programmable M-IR metamaterials.In this work, we demonstrate a phase change material tuned transmissive M-IR metasurface. The metasurface consists of an array of Au square pillars stacked above a GST switchable layer. Contrary to other metal-dielectric-metal trilayer reflective metamaterials, our design works in transmission mode by avoidingThe intense light-matter interaction of plasmonic metasurfaces provides an appealing platform for optical sensing. To date, most metasurface sensors are not spectrally tuned. Mo...

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Section: Resultsmentioning

confidence: 99%

Tunable Mid‐Infrared Phase‐Change Metasurface

Dong

Qiu

Zhou

et al. 2018

Advanced Optical Materials

126

View full text Add to dashboard Cite

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“…The emerging issue of greenhouse CO 2 emission is illustrated in Figure a for which massively deployable, CMOS compatible sensors are necessary. Conceptual integration of the hybrid metamaterial platform for CO 2 sensing with the state‐of‐the‐art NDIR system (Figure b) is presented in Figure c . Figure c shows the post‐CMOS integration of gas‐selective, enrichment layer (polyethylenimine, PEI).…”

Section: Hybrid Metamaterials Absorber Platformmentioning

confidence: 99%

Hybrid Metamaterial Absorber Platform for Sensing of CO₂ Gas at Mid‐IR

2018

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Application of two major classes of CO2 gas sensors, i.e., electrochemical and nondispersive infrared is predominantly impeded by the poor selectivity and large optical interaction length, respectively. Here, a novel “hybrid metamaterial” absorber platform is presented by integrating the state‐of‐the‐art complementary metal–oxide–semiconductor compatible metamaterial with a smart, gas‐selective‐trapping polymer for highly selective and miniaturized optical sensing of CO2 gas in the 5–8 µm mid‐IR spectral window. The sensor offers a minimum of 40 ppm detection limit at ambient temperature on a small footprint (20 µm by 20 µm), fast response time (≈2 min), and low hysteresis. As a proof‐of‐concept, net absorption enhancement of 0.0282%/ppm and wavelength shift of 0.5319 nm ppm−1 are reported. Furthermore, the gas‐ selective smart polymer is found to enable dual‐mode multiplexed sensing for crosschecking and validation of gas concentration on a single platform. Additionally, unique sensing characteristics as determined by the operating wavelength and bandwidth are demonstrated. Also, large differential response of the metamaterial absorber platform for all‐optical monitoring is explored. The results will pave the way for a physical understanding of metamaterial‐based sensing when integrated with the mid‐IR detector for readout and extending the mid‐IR functionalities of selective polymers for the detection of technologically relevant gases.

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“…10. The typical unit-cell and center wavelength for the state of the art mid-infrared metamaterial absorbers, fabricated using e-beam [22][23][24][25][29][30][31][32][33][34][35][36][37], standard UV [39][40][41][42][43], Deep UV (DUV) [21], and direct laser writing (DLW) [38] lithography methods. The metamaterial structure presented in this paper is also shown for comparison.…”

Section: Resultsmentioning

confidence: 99%

“…Therefore, the level of masked lithography that is a standard part of the infrastructure of a MEMS cleanroom (masked UV (i-line) lithography) has been explored for mid-infrared absorber fabrication. Analyzing literature on mid-infrared metamaterial-based absorbers reveals that the dividing line between e-beam fabricated, versus mask-fabricated devices is at the longer wavelength part of the IR spectrum [39][40][41][42][43]. For a typical mid-infrared design based on the cross and split-ring resonators, a feature size of about 80 nm (at 1 μm) [34] up to 400 nm (at 6 μm) [22] is required, which is beyond the specifications of masked UV lithography.…”

Section: Cmos-compatibility Design In Mid-ir Metamaterials Absorbersmentioning

confidence: 99%