Multicomponent Sn–Mo–O-containing films formed in anodic alumina matrixes by ionic layer deposition

Zakhlebayeva, Anna; Lazavenka, Andrei; Gorokh, G. G.

doi:10.1016/j.matpr.2020.09.252

Cited by 5 publications

(3 citation statements)

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In the center of the membrane was a measuring element in the form of an interdigital capacitor, consisting of three pairs of electrodes 140 µm long, 20 µm wide, and with a gap of 15 µm between them. The gas-sensitive layer ( Figure 2 b) of Sn x Bi k Mo y O z was deposited on top of the electrodes by the ion layering technique ( Figure 2 c) [ 45 , 46 , 47 , 48 , 49 , 50 ].…”

Section: Methodsmentioning

confidence: 99%

A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

Gorokh

Zakhlebayeva

Таратын

et al. 2022

Sensors

Self Cite

View full text Add to dashboard Cite

This work presents and discusses the design of an efficient gas sensor, as well as the technological process of its fabrication. The optimal dimensions of the different sensor elements including their deformation were determined considering the geometric modeling and the calculated moduli of the elasticity and thermal conductivity coefficients. Multicomponent SnxBikMoyOz thin films were prepared by ionic layering on an anodic alumina membrane and were used as gas-sensitive layers in the sensor design. The resistance of the SnxBikMoyOz nanostructured film at temperatures up to 150 °C exceeded 106 Ohm but decreased to 104 Ohm at 550 °C in air. The sensitivity of the SnxBikMoyOz composite to concentrations of 5 and 40 ppm H2 at 250 °C (10 mW) was determined to be 0.22 and 0.40, respectively.

show abstract

Section: Methodsmentioning

confidence: 99%

A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

Gorokh

Zakhlebayeva

Таратын

et al. 2022

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…Next, Si x N y was removed in the windows from the reverse side of the substrate to the Si surface (Figure 3d) and deep anisotropic alkaline etching of silicon (Figure 3e), leaving a silicon layer about 100 µm thick. After removing the photoresist (Figure 3f), the layer of aluminum 1.5 µm thick was deposited on the front side of the substrate (Figure 3g), and AA film 0.8 µm thick was formed on the Si x N y surface using the two-stage anodization [43] in the potentiostatic mode at Ea = 50 V in oxalic acid solution (Figure 3h). The electrical anodization modes were set using a Keysight N5751A system DC power supply, and the process parameters were recorded and monitored in situ using a Keysight 34470A digital multimeter connected via USB to a personal computer with the installed Bench Vue software.…”

Section: Sensor Designs With Different Heater Topologiesmentioning

confidence: 99%

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

et al. 2023

Self Cite

View full text Add to dashboard Cite

The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Comprehensive studies of the heater’s current–voltage characteristics have been carried out, heating rates have been measured at various currents, experimental temperature characteristics for various meander topologies have been obtained, heater options have been determined, and optimal heat transfer processes are ensured at a low power consumption of about 20–25 mW. Sensors with an optimal heater topology based on a double dielectric membrane were fabricated according to the described technological process, and sensory responses to 0.5 vol.% CH4 and 0.2% C3H8 were studied. The obtained results showed good results and confirmed the need to choose the optimal heater topology when designing sensors for recording the given type of gas mixtures in a certain temperature range.

show abstract

“…The most typical mechanisms for the formation of metal oxide films are the oxidation of adsorbed cations during the formation of one-component metal oxides, for example, SnO 2 , and the reduction of adsorbed anions by cations during the formation of multicomponent compounds, as in the case of Sn x MoO y [ 15 , 20 ]. As shown by the first results of studies of the deposition of two-component metal oxide films on NAA matrices, such films have good regularity, reproducibility of properties, and can be used in promising photovoltaic and sensor devices [ 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Spatially Ordered Matrix of Nanostructured Tin–Tungsten Oxides Nanocomposites Formed by Ionic Layer Deposition for Gas Sensing

Gorokh

Bogomazova

Taleb

et al. 2021

Sensors

Self Cite

View full text Add to dashboard Cite

The process of layer-by-layer ionic deposition of tin-tungsten oxide films on smooth silicon substrates and nanoporous anodic alumina matrices has been studied. To achieve the film deposition, solutions containing cationic SnF2 or SnCl2 and anionic Na2WO4 or (NH4)2O·WO3 precursors have been used. The effect of the solution compositions on the films deposition rates, morphology, composition, and properties was investigated. Possible mechanisms of tin-tungsten oxide films deposition into the pores and on the surface of anodic alumina are discussed. The electro-physical and gas-sensitive properties of nanostructured SnxWyOz films have been investigated. The prepared nanocomposites exhibit stable semiconductor properties characterized by high resistance and low temperature coefficient of electrical resistance of about 1.6 × 10−3 K−1. The sensitivity of the SnxWyOz films to 2 and 10 ppm concentrations of ammonia at 523 K was 0.35 and 1.17, respectively. At concentrations of 1 and 2 ppm of nitrogen dioxide, the sensitivity was 0.48 and 1.4, respectively, at a temperature of 473 K. At the temperature of 573 K, the sensitivity of 1.3 was obtained for 100 ppm of ethanol. The prepared nanostructured tin-tungsten oxide films showed promising gas-sensitivity, which makes them a good candidate for the manufacturing of gas sensors with high sensitivity and low power consumption.

show abstract

Multicomponent Sn–Mo–O-containing films formed in anodic alumina matrixes by ionic layer deposition

Cited by 5 publications

References 25 publications

A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Spatially Ordered Matrix of Nanostructured Tin–Tungsten Oxides Nanocomposites Formed by Ionic Layer Deposition for Gas Sensing

Contact Info

Product

Resources

About