A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

Gorokh, G. G.; Zakhlebayeva, Anna; Таратын, И. А.; Лозовенко, А. А.; Zhylinski, Valery; Iji, Michael; Fedosenko, V. S.; Taleb, Abdelhafed

doi:10.3390/s22103640

Cited by 6 publications

(2 citation statements)

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“…In 2 O 3 films are also widely used in gas sensors, but their electrical parameters differ significantly from those of SnO 2 [20][21][22]45]. The combination of these two materials retains the merits of both while smoothing out problematic issues in their use, including minimizing resistivity [46]. However, obtaining In 2 O 3 -SnO 2 films of the required composition using plasma physicochemical deposition methods is associated with certain difficulties, consisting of a significant difference between the evaporation temperatures of indium and tin compounds, as well as the need to provide different evaporation rates.…”

Section: Deposition Of Gas-sensitive Layermentioning

confidence: 99%

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

et al. 2023

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The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Comprehensive studies of the heater’s current–voltage characteristics have been carried out, heating rates have been measured at various currents, experimental temperature characteristics for various meander topologies have been obtained, heater options have been determined, and optimal heat transfer processes are ensured at a low power consumption of about 20–25 mW. Sensors with an optimal heater topology based on a double dielectric membrane were fabricated according to the described technological process, and sensory responses to 0.5 vol.% CH4 and 0.2% C3H8 were studied. The obtained results showed good results and confirmed the need to choose the optimal heater topology when designing sensors for recording the given type of gas mixtures in a certain temperature range.

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Section: Deposition Of Gas-sensitive Layermentioning

confidence: 99%

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

et al. 2023

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“…The use of porous anodic aluminium oxide (AAO) as a substrate for metal thin films offers several advantages over Si-based technology [40]. Firstly, the porous structure of AAO provides high adhesion of metal films due to a partial metal deposition into AAO pores during the film sputtering.…”

Section: Introductionmentioning

confidence: 99%

Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films

Pleshakov,

Kalinin,

Ivanov

et al. 2023

Micromachines

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Platinum-based thin films are widely used to create microelectronic devices operating at temperatures above 500 °C. One of the most effective ways to increase the high-temperature stability of platinum-based films involves incorporating refractory metal oxides (e.g., ZrO2, HfO2). In such structures, refractory oxide is located along the metal grain boundaries and hinders the mobility of Pt atoms. However, the effect of annealing conditions on the morphology and functional properties of such multiphase systems is rarely studied. Here, we show that the two-step annealing of 250-nm-thick Pt-Rh/Zr multilayer films instead of the widely used isothermal annealing leads to a more uniform film morphology without voids and hillocks. The composition and morphology of as-deposited and annealed films were investigated using X-ray diffraction and scanning electron microscopy, combined with energy-dispersive X-ray spectroscopy. At the first annealing step at 450 °C, zirconium oxidation was observed. The second high-temperature annealing at 800–1000 °C resulted in the recrystallization of the Pt-Rh alloy. In comparison to the one-step annealing of Pt-Rh and Pt-Rh/Zr films, after two-step annealing, the metal phase in the Pt-Rh/Zr films has a smaller grain size and a less pronounced texture in the <111> direction, manifesting enhanced high-temperature stability. After two-step annealing at 450/900 °C, the Pt-Rh/Zr thin film possessed a grain size of 60 ± 27 nm and a resistivity of 17 × 10−6 Ω·m. The proposed annealing protocol can be used to create thin-film MEMS devices for operation at elevated temperatures, e.g., microheater-based gas sensors.

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Role of graphene doped Al2O3 flexible sheets as the substrate for Anomalous Nernst Effect study

Corrêa

Ferreira

Junior

et al. 2023

Ceramics International

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A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnxBikMoyOz Nanocomposite

Cited by 6 publications

References 51 publications

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films

Role of graphene doped Al2O3 flexible sheets as the substrate for Anomalous Nernst Effect study

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