Multi-objective optimization of a circular dual back-plate MEMS microphone: tradeoff between pull-in voltage, sensitivity and resonance frequency

Differences between plate theory and lumped element model in electrostatic analysis of one-sided and two-sided CMUTs with circular microplates

“…(21). Furthermore, in authors' previous work, the high accuracy of this trial function in the electrostatic analysis of circular microplates has been demonstrated [1].…”

“…Due to advances in microsystem technologies, capacitive micromachined ultrasonic transducers (CMUTs) have been widely used for sensing [1][2][3][4][5][6][7][8] and actuating [9][10][11][12][13][14][15][16] purposes in the last few decades. Piezoelectric [16] and electrostatic are the two main transduction mechanisms commonly employed in CMUTs.…”

Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

“…Subsequently, other researchers have explored structural designs involving the membrane to augment the spring-anchor system [17]. Furthermore, one has employed a multi-objective optimization procedure aided by the NSGA-II algorithm [18], but these methods did not exhibit remarkable improvements in the sensitivity of the dual-backplate configuration. Apart from the dual backplate, Sant et al [19] developed a sealed-dual membrane (SDM) MEMS transducer as shown in Figure 2b.…”