2020
DOI: 10.1007/s40430-020-02551-8
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Differences between plate theory and lumped element model in electrostatic analysis of one-sided and two-sided CMUTs with circular microplates

Abstract: An analytical study of capacitive micromachined ultrasonic transducers (CMUTs) with circular microplates has been carried out. The study comprises one-sided (single electrode back-plate) and two-sided (double electrode back-plate) systems, and derives universal correction factors for pull-in voltage and critical displacement to be used in lumped element model (LEM) analysis. We employ von Karman plate theory and the single-mode Galerkin decomposition method to solve the equations. Consequently, voltage-deflect… Show more

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Cited by 7 publications
(8 citation statements)
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References 31 publications
(76 reference statements)
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“…Then, the correct parameters of this mathematical expression according to the boundary conditions lead to the final solution. This approach is interesting since it avoids heavy numerical computations, if a valid analytical expression of the plate displacement is provided [30].…”
Section: Introductionmentioning
confidence: 99%
“…Then, the correct parameters of this mathematical expression according to the boundary conditions lead to the final solution. This approach is interesting since it avoids heavy numerical computations, if a valid analytical expression of the plate displacement is provided [30].…”
Section: Introductionmentioning
confidence: 99%
“…In order to validate the result of this study, the pullin voltage is compared with [46]. However, there is a negligible difference between the values of pull-in voltage shown in Fig.…”
Section: Simulation Resultsmentioning
confidence: 88%
“…In this section, the obtained results are presented and discussed. In the first part, the modeling results of this study is validated by means of comparing with [46]. In the second part, through considering uncertainties and external disturbance, the strength and capabilities of proposed controller is demonstrated for χ d = 0.95.…”
Section: Simulation Resultsmentioning
confidence: 96%
“…Ultrasonic transducers based on capacitive switch structures are widely used in medical imaging, underwater tests, and obstacle detection. Saadatmand and Kook [ 97 ] conducted a theoretical analysis on electrostatically driven ultrasonic transducers with one-side and two-side circular plate structures and modified the voltage calculated by the lumped parameter model. Raeisifard et al [ 96 ] proposed a comprehensive model of cantilever switches under electrostatic and piezoelectric excitation.…”
Section: Reviewmentioning
confidence: 99%