1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)
DOI: 10.1109/mhs.1997.768860
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Multi-layered piezoelectric bimorph actuator

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Cited by 23 publications
(12 citation statements)
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“…Different actuator designs can be used: axial actuators in monolithic (Figure 2e, [68,191]), stack ( Figure 2a, [26,28]) or multilayer design [26,149,192], axial actuators with transmission mechanism [192,193], shear actuators (Figure 2d, [30,90,153,155,157]), bending actuators of different types (Figure 2b,c, [24,27,28,105,194]), and other designs developed especially for use in inertia motors [195]. There is no general rule as to which type of piezoelectric actuator is most beneficial for inertia motors, as this depends on the particular application.…”
Section: Solid State Actuatormentioning
confidence: 99%
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“…Different actuator designs can be used: axial actuators in monolithic (Figure 2e, [68,191]), stack ( Figure 2a, [26,28]) or multilayer design [26,149,192], axial actuators with transmission mechanism [192,193], shear actuators (Figure 2d, [30,90,153,155,157]), bending actuators of different types (Figure 2b,c, [24,27,28,105,194]), and other designs developed especially for use in inertia motors [195]. There is no general rule as to which type of piezoelectric actuator is most beneficial for inertia motors, as this depends on the particular application.…”
Section: Solid State Actuatormentioning
confidence: 99%
“…This contribution does not aim to provide a general review or classification of piezoelectric motors, as many authors have done so before, e.g., [8]; [9] (pp. [27][28][29][30][31][32][33]; [10]; [11] (p. 32); [12] (p. 414); [13] (p. 5); [14]; [15] (p. 9); [16][17][18]. The proposed classification schemas differ, and none of them comprises all motor variants described in literature.…”
Section: Introductionmentioning
confidence: 99%
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“…(9,10,(15)(16)(17)35, and 36), we obtain: where e m and c represent effective mass and damping coefficient, respectively, at the tip of the beam. These values can be easily derived experimentally or from the structure of the system.…”
Section: Piezoelectric Sensingmentioning
confidence: 99%
“…Piezoelectric sensors and actuators are increasingly becoming popular for applications in smart structures [1][2][3][4][5][6][7][8][9] . The most common configuration for these devices is a layered beam consisting of piezoelectric and non-piezoelectric layers.…”
Section: Introductionmentioning
confidence: 99%