Multi-Layer ZnO Acoustic Transducers

Hadimioglu, B.; Khuri-Yakub, B.T.; Goddard, L.C.; Quate, C. F.

doi:10.1109/ultsym.1986.198765

Cited by 5 publications

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“…The excitation of a longitudinal wave in the GHz range has been reported by Hadimioglu et al using a 0.4-mm-thick (0001) textured polycrystalline ZnO film. 4) Such piezoelectric thin films have been widely used in signal processing devices, 5,6) sensors, 7,8) and ultrasonic spectroscopy such as acoustic microscopy 9,10) and piezoelectrically induced phonons for Brillouin scattering measurements. 11,12) In contrast, it is difficult to excite shear waves in the GHz range.…”

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Highly Oriented ZnO Thin Films Deposited by Grazing Ion-Beam Sputtering: Application to Acoustic Shear Wave Excitation in the GHz Range

Yanagitani

Kiuchi

2007

jjap

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In-plane and out-of-plane oriented (1120) ZnO thin films are attractive for acoustic shear wave excitation in the GHz range. In this study it is proposed that highly oriented and submicron-thick (1120) ZnO thin films can be fabricated using an ion beam sputter-deposition system with grazing incidence to the substrate surface. The formation of the (1120) texture cannot only be attributed to the well-known ion-channeling effect or to the self-shadowing effect since the ion beam incidence direction in the system does not correspond to the ion-channeling direction of the ZnO film (the [1010] or [1120] direction). The full width at half-maximum (FWHM) values of the φ- and ψ-scan profile curves of the (1122) X-ray diffraction poles were measured to be 5 and 28°, respectively. A shear-wave transducer with a 0.9-µm-thick film exhibited a one-way conversion loss of less than 20 dB at 1–2 GHz and a 3 dB fractional bandwidth of 100%, without any longitudinal wave excitation.

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