Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle

Tumpold, David; Glacer, Christoph; Nawaz, Mohsin; Dehe, A.

doi:10.1007/s00542-014-2102-2

Cited by 8 publications

(2 citation statements)

References 17 publications

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“…Zhou and Zettl 8 used a graphene membrane as an audio transducer based on the electrostatic principle. Tumpold et al 9 performed finite element analysis (FEA) of electrostatic speakers implemented in MEMS. In our study, we applied metal sputtering on a polymer film to fabricate a speaker transducer.…”

Section: Introductionmentioning

confidence: 99%

Vibration and sound radiation of an electrostatic speaker based on circular diaphragm

Chiang

Huang

2015

The Journal of the Acoustical Society of America

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This study investigated the lumped parameter method (LPM) and distributed parameter method (DPM) in the measurement of vibration and prediction of sound pressure levels (SPLs) produced by an electrostatic speaker with circular diaphragm. An electrostatic speaker with push-pull configuration was achieved by suspending the circular diaphragm (60 mm diameter) between two transparent conductive plates. The transparent plates included a two-dimensional array of holes to enable the visualization of vibrations and avoid acoustic distortion. LPM was used to measure the displacement amplitude at the center of the diaphragm using a scanning vibrometer with the aim of predicting symmetric modes using Helmholtz equations and SPLs using Rayleigh integral equations. DPM was used to measure the amplitude of displacement across the entire surface of the speaker and predict SPL curves. LPM results show that the prediction of SPL associated with the first three symmetric resonant modes is in good agreement with the results of DPM and acoustic measurement. Below the breakup frequency of 375 Hz, the SPL predicted by LPM and DPM are identical with the results of acoustic measurement. This study provides a rapid, accurate method with which to measure the SPL associated with the first three symmetric modes using semi-analytic LPM.

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Section: Introductionmentioning

confidence: 99%

Vibration and sound radiation of an electrostatic speaker based on circular diaphragm

Chiang

Huang

2015

The Journal of the Acoustical Society of America

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“…Previous works do not capture capacitance and bias behavior and estimate the pull-in nature of the device, thereby questioning the validity of the simplified models [8] - [10]. The model validation was restricted to a range of smaller initial gaps between the diaphragm and the rigid back plate and smaller size perforation holes.…”

Section: Introductionmentioning

confidence: 99%

A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones

SHUBHAM¹

2022

Preprint

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<p>We highlight the behavioral non-linear system-level modeling approach for MEMS capacitive microphones. The combination of the finite element modeling and the large signal non-linear circuit modeling provide a strong capability to predict electro-acoustic performance for capacitive transductions. The circuit simulator tool such as Cadence Virtuoso has emerged as a powerful tool in designing behavioral models both in linear as well as in non-linear regimes. Typical small signal lumped element models fail to capture the MEMS behavior which changes over pressure and bias conditions. The models described herein capture diaphragm displacement and capacitance change over large pressure ranges for a simply supported circular plate. This can be coupled with the electrostatic force, due to the applied bias voltage, and is converted back to pressure thereby realizing a feedback loop in the circuit model. The non-linear model capability is extended to predict capacitance-bias behavior and estimate pull-in of the MEMS device. The microphone sensitivity, signal-to-noise ratio and harmonic distortions are accurately predicted using the non-linear large signal model when compared with measured microphone data.</p>

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Automated generation of feedforward control using feedback linearization of local model networks

Euler-Rolle¹,

Škrjanc

Hametner³

et al. 2016

Engineering Applications of Artificial Intelligence

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Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle

Cited by 8 publications

References 17 publications

Vibration and sound radiation of an electrostatic speaker based on circular diaphragm

Vibration and sound radiation of an electrostatic speaker based on circular diaphragm

A Behavioral Non-Linear Modeling Implementation for MEMS Capacitive Microphones

Automated generation of feedforward control using feedback linearization of local model networks

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