Multi-domain simulation using VHDL-AMS for distributed MEMS in functional environment: Case of a 2D air-jet micromanipulator

Using SysML for Smart Surface Modeling

“…The first two levels are generic in the sense that they can be refined into any physical model of intelligent conveying surface. As an example of possible refinement we have presented SysML diagrams corresponding to the distributed MEMS air-flow surface micromanipulator from [1].…”

“…Along the functional virtual prototyping (FVP) methodology promoted in [1], the constraint blocks presented in Figure 7 take part to a low physical description level called the "component model". But constraint blocks can also describe the highest global behavioral description level of FVP, called the "behavioral model".…”

“…Figure 8 illustrates this with three constraint blocks specifying the interations between the MEMS array and an object above it. It is a simplified version of the behavioral model described (mathematically and in VHDL-AMS) in [1]. Since it considers the smart surface as a whole, this specification is clearly at the most global modeling level and is a possible realization of the The formulas in the constraint blocks Horizontal dynamic and Vertical dynamic are two instances of the fundamental law of solid mechanics, respectively expressed along an horizontal axis and the vertical z-axis.…”

“…Modeling such a complex system is a challenge addressed in [1], [2], [3] with the motivation of validating by simulation the realization of a Distributed MEMS Air-flow Surface Micromanipulator (DMASM, see Figure 1). For technological reasons, the corresponding realization was limited to the microactuator layer.…”

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions

“…Modeling using VHDL-AMS or Verilog-AMS has been proposed for the modeling and for multi-domain simulation of MEMS devices in their functional environment (Chapuis et al, 2008). But as far as top validation is concerned, i.e.…”