Multi-beam pulsed laser deposition for advanced thin-film optical waveguides

Abstract

We discuss our progress in the use of multiple laser beams and multiple targets for the pulsed laser deposition of thin films for waveguide laser and magneto-optic applications. In contrast to the more widely used single-beam/single-target geometries, having more than one laser-produced plume can allow tuning of the material properties and complex engineering of the deposited thin films. For optical applications-the majority of the work reported here-dopants can be selectively introduced, lattice mismatch and residual strain can be compensated, which is an important factor for successful growth of thin films of ∼ tens of microns thickness, and refractive index values can be adjusted for fabrication of sophisticated waveguiding structures. We discuss mixed, layered, superlattice and Bragg reflector growth, which involve out-of-plane engineering of the film structure, and in-plane engineered geometries for designs relevant to thin-film disc lasing devices. Finally we briefly discuss our most recent use of multi-plume growth for magneto-optic thin films, which involves compositional tuning of final magnetic properties.

Latest Development on Pulsed Laser Deposited Thin Films for Advanced Luminescence Applications

“…A schematic showing a typical multitarget PLD experimental set-up is presented in Figure 7. It is comprised of three rotatable targets, which can be ablated using three different lasers [42]. The targets also have a programmable tilt capability and adjustable distance from the substrate.…”

Combinatorial Material Science and Strain Engineering Enabled by Pulsed Laser Deposition Using Radially Segmented Targets

“…Therefore, the number of available alloy compositions is limited by the amount of single composition targets, which can be mounted into the vacuum chamber of the setup. The only alternatives until now would be rather cost-intensive multibeam setups or movable-mirror geometries, , which need to be exactly calibrated. To the best of the authors knowledge, there is only one study in literature, where a single wedge-segmented target was used to control the composition of KTa 1– x Nb x O 3 thin films .…”

Advances and Challenges in Pulsed Laser Deposition for Complex Material Applications

“…In recent decades, sustained efforts have been carried out to modify and adapt the geometrical configuration of PLD experimental set-ups with the aim of improving the overall quality of the synthesized nanoparticles and thin films. In this respect, one should mention (i) scanning multicomponent pulsed laser deposition [11], (ii) combined PLD and magnetron sputtering [12], (iii) multibeam PLD [13], (iv) off-axis PLD [14], (v) combinatorial PLD [15,16], and (vi) reactive pulsed laser deposition [17][18][19]. Moreover, the PLD conventional technique was extended after the application of appropriate modifications for the processing of organic materials, ranging from polymers to proteins and even living cells, which were previously reported to be definitively altered after interacting with high-power laser radiation.…”