“…The binding energy around 530 eV represents Zn-O-Zn binding while the binding energy around 532 eV represents Zn-O-H binding indicative of the presence of the oxygen-vacancy defects in ZnO. 20,21 Results show that the Zn-O-H peak became weaker as more reduced graphene oxide was added into the ZnO seed layer solution. Reduced graphene oxide might cause the oxygen vacancies or defects to be filled in.…”
“…The binding energy around 530 eV represents Zn-O-Zn binding while the binding energy around 532 eV represents Zn-O-H binding indicative of the presence of the oxygen-vacancy defects in ZnO. 20,21 Results show that the Zn-O-H peak became weaker as more reduced graphene oxide was added into the ZnO seed layer solution. Reduced graphene oxide might cause the oxygen vacancies or defects to be filled in.…”
“…Moreover, the Ce 2 Ti 2 O 7 membrane with NH 3 plasma treatment had the least drift voltage of 0.21 mV/hr, signifying that Ti doping combined with NH 3 plasma treatment could effectively enhance sensing capability. Moreover, to compare EIS membranes composed of various materials and treated with different treatment, the EIS pH biosensing devices incorporating ZnO, Gd 2 O 3 , Gd 2 TiO 7 and Nb 2 O 5 membranes are compared with CeO 2 and Ce 2 TiO 7 membranes as shown in Table 1
9, 32–34 .Figure 9The drift voltage of ( a ) CeO 2 and ( b ) Ce 2 Ti 2 O 7 sensing membrane with NH 3 plasma treatment in various conditions and then dipped in pH7 buffer solution for 12 hours.
…”
Section: Resultsmentioning
confidence: 99%
“…EIS biosensing devices have been attracting intensive attention because of their rapid response, robustness, compact size, and possible integration with an on-chip circuit 7, 8 . Over the past decade, various types of metal oxides such as Nb 2 O 5
9 , HfO 2
10 , and TiO 2
11 have been used as the sensing insulator in an EIS structure. Recently, some rare earth oxides, with advantages including wide band gaps, large band offsets on Si, and high dielectric constants have been demonstrated as good sensing insulators for EIS biosensing devices 12, 13 .…”
In this study, CeO2 pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH3 plasma treatment on the surface. To examine the effects of Ti doping and plasma treatment, multiple material properties evaluations were conducted using field-emission scanning electron microscopy, X-ray diffraction, atomic force microscopy, and secondary ion mass spectroscopy. Results indicate that Ti doping and plasma treatment can remove defects and enhance crystallization, thereby achieving improved pH-sensing performance of the membrane with high sensitivity, high linearity, low hysteresis voltage and low drift voltage. CeO2-based EIS membranes with Ti doping and NH3 plasma treatment show promise for future portable pH-sensitive biosensors.
“…The research in sensors applications shows an extensive application and has increased over the past decade 1 . The need to identify and quantify small amounts of specific species has also contributed to the arousing interest in sensors and biosensors 2 owing to many biological and chemical processes depends on pH and it could aid in pH measurement, for example.…”
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