Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

Capuano, Luigi; Pohl, Randolf; Tiggelaar, Roald M.; Berenschot, J.W.; Gardeniers, Han; Römer, G.R.B.E.

doi:10.1364/oe.26.029283

Cited by 17 publications

(11 citation statements)

References 36 publications

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“…When focused laser beam modifies crystalline sapphire modified region becomes amorphous [ 143 ]. Then, amorphous and porous regions are etched out in aggressive etchants like concentrated (40–50%) HF at room temperature [ 140 , 141 , 142 , 144 , 145 , 146 ] or around 35% KOH solution heated to 85–100 °C temperature [ 147 ]. Even more exotic etchant choices were demonstrated—sapphire was etched in phosphoric and sulfuric acid mixture at 300 °C temperature [ 148 , 149 ].…”

Section: Fabrication Of Functional 3d Structuresmentioning

confidence: 99%

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Butkutė

Jonušauskas

2021

Micromachines

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The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namely glasses and crystals. This review is dedicated to overviewing the significant advances in the field. First, the underlying physical mechanism of material interaction with ultrashort pulses is discussed, highlighting how it can be exploited for volumetric, high-precision 3D processing. Next, three distinct transparent material modification types are introduced, fundamental differences between them are explained, possible applications are highlighted. It is shown that, due to the flexibility of fs pulse fabrication, an array of structures can be produced, starting with nanophotonic elements like integrated waveguides and photonic crystals, ending with a cm-scale microfluidic system with micro-precision integrated elements. Possible limitations to each processing regime as well as how these could be overcome are discussed. Further directions for the field development are highlighted, taking into account how it could synergize with other fs-laser-based manufacturing techniques.

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Section: Fabrication Of Functional 3d Structuresmentioning

confidence: 99%

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Butkutė

Jonušauskas

2021

Micromachines

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“…This could be accounted for by the band-gap of sapphire (~9 eV), which is much wider compared with the other materials. Such a large band-gap means that sapphire is somewhat transparent for wavelengths between approximately 0.3 µm to 4 µm [37,38], and gives rise to the laser beam focussing slightly below the surface of the sapphire. This, along with the mechanical properties of sapphire, is believed to have given rise to the finer grains of deposited material.…”

Section: Laser Surface Modification Of the Optically Transparent Materialsmentioning

confidence: 99%

Micro-Machining of Diamond, Sapphire and Fused Silica Glass Using a Pulsed Nano-Second Nd:YVO4 Laser

Waugh

Walton

2021

Optics

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Optically transparent materials are being found in an ever-increasing array of technological applications within industries, such as automotive and communications. These industries are beginning to realize the importance of implementing surface engineering techniques to enhance the surface properties of materials. On account of the importance of surface engineering, this paper details the use of a relatively inexpensive diode-pumped solid state (DPSS) Nd:YVO4 laser to modify the surfaces of fused silica glass, diamond, and sapphire on a micrometre scale. Using threshold fluence analysis, it was identified that, for this particular laser system, the threshold fluence for diamond and sapphire ranged between 10 Jcm−2 and 35 Jcm−2 for a laser wavelength of 355 nm, dependent on the cumulative effects arising from the number of incident pulses. Through optical microscopy and scanning electron microscopy, it was found that the quality of processing resulting from the Nd:YVO4 laser varied with each of the materials. For fused silica glass, considerable cracking and deformation occurred. For sapphire, good quality features were produced, albeit with the formation of debris, indicating the requirement for post-processing to remove the observed debris. The diamond material gave rise to the best quality results, with extremely well defined micrometre features and minimal debris formation, comparative to alternative techniques such as femtosecond laser surface engineering.

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“…48728) with a 10-mm entrance aperture is also used, resulting in an estimated focal-spot diameter of 2.6 μm. This objective is not coverslip corrected, resulting in spherical aberration that stretches the focus axially and reduces the peak intensity at the focus [22]. Reduced intensity from spherical aberration effects and chirp from additional glass in the 0.95-NA objective is compensated by increasing the pulse energy.…”

Section: Experimental and Calculation Details A Experimentsmentioning

confidence: 99%

Femtosecond-Laser-Induced Nanoscale Blisters in Polyimide Thin Films through Nonlinear Absorption

et al. 2020

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Nonlinear absorption of femtosecond laser pulses provides a unique opportunity to confine energy deposition in any medium to a region that is below the focal diameter of a pulse. Illumination of a polymer film through a transparent high-band-gap material such as glass, followed by nonlinear absorption of 800nm light in polymers, allows us to further restrict absorption to a very thin layer along the propagation direction. We demonstrate this confinement by simulating femtosecond-laser-induced polymer modification by linear, two-photon, and three-photon absorption, and discuss the control over energy absorption in polymers that multiphoton processes offer. Energy deposited in a thin polymer film induces a protruding blister. We present experimental results for blister diameter and height scaling with variation of pulse energy. Using pulse energies of 20-200 nJ and 0.4-NA focusing, we fabricate blisters with diameters of 1-5.5 μm and heights of 75 nm to 2 μm. Using 0.95-NA focusing, we obtain laser-induced blisters with diameters as small as 700 nm, suggesting blister-based laser-induced forward transfer is possible on and below the 1-μm scale. Submicrometer blister formation with use of femtosecond lasers also offers a method of direct, precise laser writing of microstructures on films with single laser pulses. This method is a possible alternative to lithography, laser milling, and laser-based additive machining.

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Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

Cited by 17 publications

References 36 publications

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

Micro-Machining of Diamond, Sapphire and Fused Silica Glass Using a Pulsed Nano-Second Nd:YVO4 Laser

Femtosecond-Laser-Induced Nanoscale Blisters in Polyimide Thin Films through Nonlinear Absorption

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