Morphology control of ferroelectric lead titanate thin films prepared by electrostatic spray deposition

Huang, Huijun

doi:10.1016/s0040-6090(03)01906-0

Cited by 3 publications

(3 citation statements)

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“…Surprisingly, the surface roughness for any given n was less than the volume equivalent diameter of the average deposited agglomerate (agglomerate with n primary particles). Highly uniform films produced by EHDA pyrolysis have been observed previously (Huang et al 2004;Kaelin et al 2004). Presumably, this is due to the random nature of the deposition process, as the probability of a particle depositing in a given area was assumed to be constant during simulations.…”

Section: Droplet Geometric Standard Deviationmentioning

confidence: 91%

Porous Film Deposition by Electrohydrodynamic Atomization of Nanoparticle Sols

Hogan

Biswas

2008

Aerosol Science and Technology

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Film deposition by electrohydrodynamic atomization of nanoparticle sols was studied experimentally using zinc oxide nanoparticles in ethanol and using sequential Monte Carlo simulations, in which proper statistics and particle transport to the substrate were accounted for. Experimentally produced and simulated films were in good agreement, and simulations were used to determine the influences of deposition time, nanoparticle concentration in the sol, mean droplet size, and droplet polydispersity on the film thickness, porosity, surface roughness, and lateral feature size. Film growth rates were non-constant due to decreases in the film porosity early in the deposition process. Over time, the thickness of films increased, while the porosity decreased. After sufficient deposition time, the porosity reached a constant value and consequently the film growth rate was constant. The use of high concentration sols or large droplets resulted in the deposition of agglomerated particles, which gave rise to thicker, more porous films. Control over film morphology using droplets from size distributions with geometric standard deviations greater than 2.0 was not possible and the film thickness and air to particle volume ratio for all films produced from polydisperse droplets were convergent regardless of the number concentration of nanoparticles in the sol. Film surface roughnesses were less than the volume equivalent diameter of the agglomerated particles deposited, indicating that films were relatively uniform in thickness. Radial distribution functions were calculated for both experimentally deposited and simulated films and were used to determine lateral feature sizes. Lateral feature sizes increased with increasing deposition time and deposited agglomerate size until the deposition surface was completely covered. This work provides the necessary link between electrohydrodynamic atomization parameters and the resulting morphology of deposited films.

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Section: Droplet Geometric Standard Deviationmentioning

confidence: 91%

Porous Film Deposition by Electrohydrodynamic Atomization of Nanoparticle Sols

Hogan

Biswas

2008

Aerosol Science and Technology

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“…More source materials, including inorganic compounds such as metal nitrates and chlorides, can be used in aerosol deposition techniques, but there are some problems such as complicated thermal treatment, porous structure, and shorting failure of the films. [22,23] In order to extend the range of source materials and use safe and commercially available chemicals as precursors in thin film deposition, a deposition technique similar to CVD, mist plasma evaporation (MPE), has been developed (by us) to deposit TiO 2 , LaNiO 3 , and BaTiO 3 thin films using an aqueous solution of a metal chloride or nitrate as the precursor. [24][25][26] The MPE deposition process is characterized by the injection of liquid reactants into thermal plasma where droplets of the solution are partially or totally evaporated, decomposed, and ionized to their elements.…”

Section: Introductionmentioning

confidence: 99%

Preparation and Properties of SrTiO3 Thin Films Produced by Mist Plasma Evaporation Using a Metal Nitrate Aqueous Precursor

Huang

Yao

Tan

2005

Chem. Vap. Deposition

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The mist plasma evaporation technique was developed to deposit SrTiO 3 thin films under atmospheric pressure using an aqueous solution of strontium nitrate and titanium nitrate as the precursor. This technique is characterized by the injection of liquid reactants into thermal plasma where droplets of the precursor solution are partially or totally evaporated, decomposed, and ionized to their elements. The films deposited by mist plasma evaporation were cubic perovskite SrTiO 3 , and showed paraelectric properties at room temperature. The morphology of the SrTiO 3 thin films was affected by substrate and substrate temperature. The dielectric constant and dielectric loss of the SrTiO 3 film at 100 kHz were 58 and 0.239, respectively.

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“…These include physical vapor deposition such as rf-sputtering [2], and chemical vapor deposition of metalorganic deposition [3], spray pyrolysis [4], and so on. Spray pyrolysis [5] is an economic and convenient process and has been used on the fabrication of inorganic films [6][7]. However, literatures on the fabrication and electrical characteristics of PZT and PLZT thin films by spray pyrolysis are very few [8].…”

mentioning

confidence: 99%

Electrical Characteristics and Preparation of Nanostructured Pb(Zr0.5Ti0.5)O3 Ferroelectric Films by Spray Pyrolysis

Chen¹,

Koo²,

Hotta³

et al. 2006

Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials

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Nanostructured ferroelectric thin films of Pb(Zr 0.5 Ti 0.5)O 3 on Pt/Ti/SiO 2 /Si substrates are prepared by spray pyrolysis and thermal annealing. The crystal structure of the as-sprayed films transformed from amorphous, pyrochlore, multiple phases of pyrochlore and perovskite, to a single phase of perovskite as the annealing temperature is increased up to 500 o C. The physical characteristics of the resultant films show the dielectric constant of 400, remanent polarization of 30.0µC/cm 2 and coercive field of 70.0kV/cm, respectively.

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Morphology control of ferroelectric lead titanate thin films prepared by electrostatic spray deposition

Cited by 3 publications

References 0 publications

Porous Film Deposition by Electrohydrodynamic Atomization of Nanoparticle Sols

Porous Film Deposition by Electrohydrodynamic Atomization of Nanoparticle Sols

Preparation and Properties of SrTiO3 Thin Films Produced by Mist Plasma Evaporation Using a Metal Nitrate Aqueous Precursor

Electrical Characteristics and Preparation of Nanostructured Pb(Zr0.5Ti0.5)O3 Ferroelectric Films by Spray Pyrolysis

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