The silylation reaction of polytetramethylene glycol (PTMG) with trimethylchlorosilane (TMS) in DMSO was studied as the first step of the synthesis of new fluorinated polyether glycol. The extent of silylation was measured by 1 H-NMR, and the silylation product was characterized with FTIR, 1 H-NMR. The effects of the experimental conditions, i.e., reaction time and temperature, silylation reagent concentration (TMS/OH molar ratio) were investigated. The increase in reaction temperature and reaction time favored the silylation yields. After grafting reaction and ultimate deprotection of the silylated PTMG, novel fluorinated polyether glycol could be readily recovered.