2018
DOI: 10.3390/ma11040631
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Morphological Evolution of Vertically Standing Molybdenum Disulfide Nanosheets by Chemical Vapor Deposition

Abstract: In this study, we demonstrated the chemical vapor deposition (CVD) of vertically standing molybdenum disulfide (MoS2) nanosheets, with an unconventional combination of molybdenum hexacarbonyl (Mo(CO)6) and 1,2-ethanedithiol (C2H6S2) as the novel kind of Mo and S precursors respectively. The effect of the distance between the precursor’s outlet and substrates (denoted as d) on the growth characteristics of MoS2, including surface morphology and nanosheet structure, was investigated. Meanwhile, the relationship … Show more

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Cited by 11 publications
(9 citation statements)
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“…These facilities make MoS 2 compatible for gas-sensing application [ 100 ]. The low binding energy of 6.1 and 13.9 eV is needed to create S and Mo vacancies, respectively, which can turn the edges of MoS 2 flakes into metallic sites [ 101 , 102 ]. MoS 2 has a tunable bandgap compared to graphene which increases the overall sensing performance of MoS 2 film [ 103 ].…”
Section: Introductionmentioning
confidence: 99%
“…These facilities make MoS 2 compatible for gas-sensing application [ 100 ]. The low binding energy of 6.1 and 13.9 eV is needed to create S and Mo vacancies, respectively, which can turn the edges of MoS 2 flakes into metallic sites [ 101 , 102 ]. MoS 2 has a tunable bandgap compared to graphene which increases the overall sensing performance of MoS 2 film [ 103 ].…”
Section: Introductionmentioning
confidence: 99%
“…While considerable progress has been made in the synthesis of 2D materials, optimization of growth to obtain the desired microstructure has been a very empirical one. , Though physicochemical models of graphene growth have now been reported, there have been very few recent reports for more complicated systems such as MoS 2 and other transition metal chalcogenides such as WSe 2 and WS 2 . In an earlier paper, we had studied the effect of pressure on the nucleation and growth of MoS 2 domains by a CVD method in which Mo­(CO) 6 and H 2 S were used as the precursors for Mo and S. Recent reports ,, for various vapor deposition techniques testify that this chemistry is getting popular for growth of sulfides and selenides of both Mo and W.…”
Section: Introductionmentioning
confidence: 99%
“…The effect of CVD parameters on the quality of TMD flakes and films have been investigated such as growth temperature, carrier gas flow rate, substrate orientations, pressure and position of precursors. [ 13 16 ] These experimental approaches require considerable amount of resources and are highly dependent on post‐growth analyses. Besides, in‐situ monitoring is often expensive and difficult to be implemented in a CVD system.…”
Section: Introductionmentioning
confidence: 99%