Morphological evolution and structural study of annealed amorphous-Ge films: Interplay between crystallization and dewetting

Freddi, Sonia; Sfuncia, Gianfranco; Gherardi, Michele; Nicotra, Giuseppe; Barri, Chiara; Fagiani, Luca; Bouabdellaoui, Mohammed; Fedorov, Alexey; Chatain, Dominique; Sanguinetti, Stefano; Abbarchi, Marco; Bollani, Monica

doi:10.1016/j.mssp.2024.108228

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108228

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Morphological evolution and structural study of annealed amorphous-Ge films: Interplay between crystallization and dewetting

Sonia Freddi,

Gianfranco Sfuncia,

Michele Gherardi

et al.

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2024

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Scalable hyperuniform and flexible photonic devices based on dielectric antennas realized by solid state dewetting

Freddi,

Gherardi,

Brescia

et al. 2024

Fiber Lasers and Glass Photonics: Materials Through Applications IV

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We present a novel, simple and low-cost protocol for fabricating pure Si, or Si1−xGex or Ge-based, sub-micrometric dielectric antennas with ensuing hybrid integration into different plastic supports. The dielectric antennas are realized exploiting the natural instability of thin solid films to form regular patterns of monocrystalline atomically smooth SiGe nanostructures that cannot be realized with conventional methods. By adjusting the annealing treatment and the semiconductor film thicknesses, different classes of nanoarchitectures can be formed, from elongated and periodic structures to disordered structures with a footprint of just a few tens of nm. This latter disordered case presents a significant suppression of the large-scale fluctuations that are conventionally observed in ordered systems and shows an almost hyperuniform behavior character.

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Scalable hyperuniform and flexible photonic devices based on dielectric antennas realized by solid state dewetting

Freddi,

Gherardi,

Brescia

et al. 2024

Fiber Lasers and Glass Photonics: Materials Through Applications IV

View full text Add to dashboard Cite

show abstract

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Morphological evolution and structural study of annealed amorphous-Ge films: Interplay between crystallization and dewetting

Cited by 1 publication

References 35 publications

Scalable hyperuniform and flexible photonic devices based on dielectric antennas realized by solid state dewetting

Scalable hyperuniform and flexible photonic devices based on dielectric antennas realized by solid state dewetting

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