Scalable hyperuniform and flexible photonic devices based on dielectric antennas realized by solid state dewetting
Sonia Freddi,
Michele Gherardi,
Arianna Brescia
et al.
Abstract:We present a novel, simple and low-cost protocol for fabricating pure Si, or Si1−xGex or Ge-based, sub-micrometric dielectric antennas with ensuing hybrid integration into different plastic supports. The dielectric antennas are realized exploiting the natural instability of thin solid films to form regular patterns of monocrystalline atomically smooth SiGe nanostructures that cannot be realized with conventional methods. By adjusting the annealing treatment and the semiconductor film thicknesses, different cla… Show more
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