Moore's law: the future of Si microelectronics

Thompson, Scott E.; Parthasarathy, S.

doi:10.1016/s1369-7021(06)71539-5

Cited by 549 publications

(375 citation statements)

References 18 publications

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“…284,285 However, conventional photolithography cannot achieve the high resolution especially when the feature size decrease is required. Two-photon photopolymerization appears to overcome such limitations, and three-dimensional nanostructures (3D) can be fabricated.…”

Section: New and Emerging Applicationsmentioning

confidence: 99%

Photoinitiated Polymerization: Advances, Challenges, and Opportunities

2010

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The use of photoinitiated polymerization is continuously growing in industry as reflected by the large number of applications in not only conventional areas such as coatings, inks, and adhesives but also high-tech domains, optoelectronics, laser imaging, stereolithography, and nanotechnology. In this Perspective, the latest developments in photoinitiating systems for free radical and cationic polymerizations are presented. The potential use of photochemical methods for step-growth polymerization is also highlighted. The goal is, furthermore, to show approaches to overcome problems associated with the efficiency, wavelength flexibility, and environmental and safety issues in all photoinitiating systems for different modes of activation. Much progress has been made in the past 10 years in the preparation of complex and nanostructured macromolecules by using photoinitiated polymerizations. Thus, the new and emerging applications of photoinitiated polymerizations in the field of biomaterials, surface modification, preparation of block and graft copolymers, and nanocomposites have been addressed.

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Section: New and Emerging Applicationsmentioning

confidence: 99%

Photoinitiated Polymerization: Advances, Challenges, and Opportunities

2010

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“…The fabrication process of this all-solid-state micro-LIB was performed by the Si-compatible technologies and would be beneficial for the integration with other micro/nano electronic devices. However, this micro-sized anode may present poor electrochemical performance due to the volume expansion during the cycling and intrinsic low electronic/ionic conductivities in the Si electrode [77,78]. Therefore, an alternative and effective strategy is required to circumvent the corresponding negative effects.…”

Section: Fabrication Of 3d Micro-libs With Si As the Active Materialsmentioning

confidence: 99%

Fabrication of Si-based three-dimensional microbatteries: A review

Yue

Liu

2017

Front. Mech. Eng.

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High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nanoelectromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support substrates, electrodes or current collectors, electrolytes, and even batteries used in 3D layouts has become increasingly important in fabricating microbatteries with high energy, high power density, and wide-ranging applications. In this review, Si-based 3D microbatteries and related fabrication technologies, especially the production of micro-lithium ion batteries, are reviewed and discussed in detail in order to provide guidance for the design and fabrication.

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“…The miniaturization of integrated circuits down to sub-micrometric scales has been key in the developments of increasingly more advanced microelectronic devices which are ubiquitous in our daily life [1]. In recent years, however, the pace of miniaturization has considerably slowed down as the customary "top-down" fabrication methods are reaching the limit of their capability [2].…”

Section: Introductionmentioning

confidence: 99%