Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement

Kim, Jung-Mu; Kim, Namgon; Park, Jae‐Hyoung; Cheon, Changyul; Kwon, Youngwoo; Kim, Yong-Kweon

doi:10.1109/sensor.2007.4300217

Cited by 1 publication

(2 citation statements)

References 5 publications

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“…Every sample is isolated subsequent to the release process and photoresist coating as a passivation layer for the dicing process. RF MEMS transmission lines (3 µm thickness) are fabricated on a quartz substrate and have a semi-coaxial-like structure composed of a BCB layer (20 µm thickness) [5,6,[9][10][11]. Each fabricated component is shown in figure 5(a) and the assembled figure including the jig and SMA connector is shown in figure 5(b).…”

Section: Fabrication Resultsmentioning

confidence: 99%

“…We used cyclotene 4026-46. The thickness of the dielectric layer was determined as 20 µm because the maximum thickness of cyclotene 4026-46 in a single coating is 20 µm [11]. The width of the signal and gap is designed to match to 50 , and full-wave simulation was performed using a commercial EM simulator, HFSS (ANSOFT).…”

Section: Micromachined Transmission Line With Planar-type Aperturementioning

confidence: 99%

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A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

Kim¹,

Cheon²,

Kwon³

et al. 2008

J. Micromech. Microeng.

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This paper reports a hybrid RF MEMS probe array system for permittivity measurements. A single-pole triple-throw (SP3T) RF MEMS silicon switch and a novel surface micromachined transmission line with three planar apertures were designed, fabricated and measured. These MEMS devices were connected using wire bonding and bond wire effects were cancelled as a consequence of in-liquid calibration of the whole system. A permittivity measurement of 0.9% saline was made by operating each RF MEMS silicon switch. The measured result showed good agreement with the reference value from the Cole–Cole equation up to 20 GHz. This result shows the feasibility of the proposed hybrid RF MEMS probe array system for permittivity measurements.

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Section: Fabrication Resultsmentioning

confidence: 99%

Section: Micromachined Transmission Line With Planar-type Aperturementioning

confidence: 99%

A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

Kim¹,

Cheon²,

Kwon³

et al. 2008

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement

Cited by 1 publication

References 5 publications

A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

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