A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

Abstract

This paper reports a hybrid RF MEMS probe array system for permittivity measurements. A single-pole triple-throw (SP3T) RF MEMS silicon switch and a novel surface micromachined transmission line with three planar apertures were designed, fabricated and measured. These MEMS devices were connected using wire bonding and bond wire effects were cancelled as a consequence of in-liquid calibration of the whole system. A permittivity measurement of 0.9% saline was made by operating each RF MEMS silicon switch. The measured result showed good agreement with the reference value from the Cole–Cole equation up to 20 GHz. This result shows the feasibility of the proposed hybrid RF MEMS probe array system for permittivity measurements.

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“…The vast majority of RF MEMS switches today utilize thin-film metals as structural materials in order to decrease the RF loss of these devices. Devices that have attempted to utilize non-metallic structural materials [4], [5], [6], [7], [8] have not been successful due to poor RF performance and/or excessive process complexity that counteracts the advantages offered by single-crystal silicon.…”

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“…As an alternative to mechanically scanning over the sample, probe arrays have been developed [46], [49], [50].…”

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“…The fabrication follows a well established SiOG process using silicon-glass anodic bonding and silicon deep reactive ion etching [8], [9] as shown in Fig. 3.…”