Monolithic piezoresistive CMOS magnetic field sensors

Beroulle, Vincent; Bertrand, Yves; Latorre, Laurent; Nouet, Pascal

doi:10.1016/s0924-4247(02)00317-5

Cited by 68 publications

(41 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this study, a 3-axis MF microsensor was developed using the CMOS-MEMS technique. Several CMOS-MEMS magnetic microsensors [26][27][28] have required post-processing to obtain suspension components and to add functional materials. The MF sensor in this work did not require any post-processing, and its fabrication was fully consistent with the CMOS process.…”

Section: Introductionmentioning

confidence: 99%

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

et al. 2017

View full text Add to dashboard Cite

Featured Application: Three-axis magnetic field microsensors in this study can be applied to various electronic instruments, portable electronic devices, mobile phones, and industrial equipment.Abstract: This study develops a three-axis magnetic field (MF) microsensor manufactured by a complementary metal oxide semiconductor (CMOS) process. The MF microsensor contains a ring emitter, four bases, and eight collectors. Sentaurus TCAD was used to simulate the microsensor characterization. The STI (shallow trench isolation) oxide in the process was used to limit the current direction and reduce leakage current. The microsensor produces a voltage difference once it senses a magnetic field. An amplifier circuitry magnifies voltage difference into a voltage output. Experiments reveals that the MF microsensor has a sensitivity of 1.45 V/T along the x-axis and a sensitivity of 1.37 V/T along the y-axis.

show abstract

Section: Introductionmentioning

confidence: 99%

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

et al. 2017

View full text Add to dashboard Cite

show abstract

“…Other examples of piezoresistive magnetic sensors on the microscale have been reported in the literature (Beroulle et al (2003), Sunier et al (2006)). …”

Section: Resonant Magnetic Sensorsmentioning

confidence: 98%

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Todaro¹,

Sileo²,

Vittorio³

2012

Magnetic Sensors - Principles and Applications

View full text Add to dashboard Cite

“…Beroulle et al (2003) reported a magnetic field microsensor integrated by a resonant Ushaped cantilever (520 m length and 80 m thick), a planar aluminium coil of 8 turns, and a Wheatstone bridge of polysilicon strain gauges. This microsensor exploits the Lorentz force principle in order to measure an external magnetic field, converting it into an electrical output signal through Wheatstone bridge.…”

Section: Piezoresistive Sensingmentioning

confidence: 99%