Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Todaro, M. T.; Sileo, Leonardo; Vittorio, Massimo De

doi:10.5772/36468

Cited by 3 publications

(1 citation statement)

References 47 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Current technologies providing a high magnetic sensitivity, such as optical pumped magnetometry (OPM) [3], superconducting quantum interference devices (SQUID) [4], microelectromechanical systems (MEMS) [5], and magnetic resonance force microscopy (MRFM) [6], are highly successful technologies that have made possible the measurement of the magnetic field generated by neuronal activity with great precision. These systems have been previously described and compared [7].…”

Section: Introductionmentioning

confidence: 99%

Hands-On Quantum Sensing with NV− Centers in Diamonds

Toural

Marzoa

Gavito

et al. 2023

View full text Add to dashboard Cite

The physical properties of diamond crystals, such as color or electrical conductivity, can be controlled via impurities. In particular, when doped with nitrogen, optically active nitrogen-vacancy centers (NV), can be induced. The center is an outstanding quantum spin system that enables, under ambient conditions, optical initialization, readout, and coherent microwave control with applications in sensing and quantum information. Under optical and radio frequency excitation, the Zeeman splitting of the degenerate states allows the quantitative measurement of external magnetic fields with high sensitivity. This study provides a pedagogical introduction to the properties of the NV centers as well as a step-by-step process to develop and test a simple magnetic quantum sensor based on color centers with significant potential for the development of highly compact multisensor systems.

show abstract

Section: Introductionmentioning

confidence: 99%

Hands-On Quantum Sensing with NV− Centers in Diamonds

Toural

Marzoa

Gavito

et al. 2023

View full text Add to dashboard Cite

show abstract

Lorentz Force Magnetic Sensor based on a Thin-Film Piezoelectric-on-Silicon Laterally Vibrating Micromechanical Resonator

Ghosh

Lee

2016

Procedia Engineering

View full text Add to dashboard Cite

3D Lorentz force magnetic sensor using ultra-thin piezoresistive cantilevers

Wattanasarn

Matsumoto

Shimoyama

2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

View full text Add to dashboard Cite

This paper reports on a Lorentz force-based triaxial magnetometer using three ultra-thin cantilevers. Instead of wholly fabricating 300nm-thick cantilever sets in plane, one of them is erected with a principle of residual stress of multi-layer to measure an out-of-plane magnetic field. In addition to realizing the highest sensitivity of ultra-thin piezo-resistive cantilevers, sensing characteristics of each direction are also comparable. With 10-mA direct excitation current, the sensor exhibits 3-axis magnetically sensing capability with an average sensitivity of ∆R/R 0 =2.63 A -1 T -1 , resolution of 1mT, and power consumption less than 11mW. The proposed sensor is versatile enough to serve various demands of magnetically measuring works.

show abstract

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Cited by 3 publications

References 47 publications

Hands-On Quantum Sensing with NV− Centers in Diamonds

Hands-On Quantum Sensing with NV− Centers in Diamonds

Lorentz Force Magnetic Sensor based on a Thin-Film Piezoelectric-on-Silicon Laterally Vibrating Micromechanical Resonator

3D Lorentz force magnetic sensor using ultra-thin piezoresistive cantilevers

Contact Info

Product

Resources

About