Monolithic Integration of Mid-Infrared Quantum Cascade Lasers and Frequency Combs with Passive Waveguides

Wang, Ruijun; Täschler, Philipp; Wang, Zhixin; Gini, E.; Beck, Mattias; Faist, Jérôme

doi:10.1021/acsphotonics.1c01767

Cited by 16 publications

(10 citation statements)

References 36 publications

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“…This could be expanded further by fabricating more complex dry-etched waveguide facet geometries, for example an adiabatic taper coupled to a passive waveguide, to make the reflectivity even lower. Finally, coupling broadband frequency combs to passive waveguides on the same chip, as already demonstrated in the Mid-IR 55 , is an important milestone towards fully integrated active and passive THz photonic circuits and spectrometers.…”

Section: Resultsmentioning

confidence: 94%

Planarized THz quantum cascade lasers for broadband coherent photonics

et al. 2022

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Recently, there has been a growing interest in integrated THz photonics for various applications in communications, spectroscopy and sensing. We present a new integrated photonic platform based on active and passive elements integrated in a double-metal, high-confinement waveguide layout planarized with a low-loss polymer. An extended top metallization keeps waveguide losses low while improving dispersion, thermal and RF properties, as it enables to decouple the design of THz and microwave cavities. Free-running on-chip quantum cascade laser combs spanning 800 GHz, harmonic states with over 1.1 THz bandwidth and RF-injected broadband incoherent states spanning over nearly 1.6 THz are observed using a homogeneous quantum-cascade active core. With a strong external RF drive, actively mode-locked pulses as short as 4.4 ps can be produced, as measured by SWIFTS. We demonstrate as well passive waveguides with low insertion loss, enabling the tuning of the laser cavity boundary conditions and the co-integration of active and passive elements on the same THz photonic chip.

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Section: Resultsmentioning

confidence: 94%

Planarized THz quantum cascade lasers for broadband coherent photonics

et al. 2022

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“…For example, evanescent coupling between a QCL and an InGaAs/InP waveguide has been demonstrated in a homogeneous platform, − and optical losses below 5 dB/cm were demonstrated in similar waveguides up to 11 μm wavelength in transverse electric (TE) polarization . Also, our group has recently demonstrated a butt-coupling configuration between a QCL and a passive InGaAs waveguide, both buried in InP . The propagation losses of the passive section were estimated to be 1.2 dB/cm near the 8 μm wavelength, deduced from the different laser performances.…”

Section: Introductionmentioning

confidence: 97%

Low-Loss Buried InGaAs/InP Integrated Waveguides in the Long-Wave Infrared

Montesinos-Ballester,

Jöchl,

Turpaud

et al. 2024

ACS Photonics

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In this work, we present a photonic integrated platform based on buried InGaAs waveguides with InP cladding that operates over a large mid-infrared (mid-IR) spectral range. Thanks to wet-etch fabrication patterning and Fe doping, low propagation losses below 1.2 dB/cm (0.3 cm −1 loss coefficient) have been obtained between 4.6 and 11.2 μm wavelengths (890− 1960 cm −1 wavenumber), in both transverse electric (TE) and transverse magnetic (TM) polarization modes. The possibility of monolithically integrating such waveguides with mid-IR sources offers promising perspectives for developing broadband, homogeneously integrated systems.

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“…In response to these challenges, a monolithic integration approach featuring an all III-V semiconductor design has emerged as a promising solution [4]. Building on our previous work with InGaAs/InP-based AWG, which exhibited insertion losses comparable to silicon counterparts [5], we extend our design strategy to fabricate AWG with multi-quantum wells as the core material.…”

Section: Introductionmentioning

confidence: 99%

Monolithic beam combined quantum cascade laser arrays with integrated arrayed waveguide gratings

Karnik,

Diehl,

Dao

et al. 2024

Novel in-Plane Semiconductor Lasers XXIII

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We report the fabrication of a monolithic closed-loop wavelength beam combined quantum cascade laser (QCL) source. The chip comprises five QCL gain sections connected to 5 × 1 arrayed waveguide gratings (AWG) via active/passive tapered couplers and a router. The chip is fabricated on a MOCVD-grown III-V semiconductor substrate. The entire passive section of the chip undergoes ion implantation to reduce the propagation losses due to free carrier absorption. The peak power for all the QCL array elements reached 600 mW per facet with a 2 kA/cm 2 threshold current density under pulsed operation. Furthermore, our WBC approach is compatible with buried heterostructure processing, which allows continuous wave operation with high output power. Our results hold promise in manufacturing compact and multiwavelength mid-infrared sources with good beam quality.

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Monolithic Integration of Mid-Infrared Quantum Cascade Lasers and Frequency Combs with Passive Waveguides

Cited by 16 publications

References 36 publications

Planarized THz quantum cascade lasers for broadband coherent photonics

Planarized THz quantum cascade lasers for broadband coherent photonics

Low-Loss Buried InGaAs/InP Integrated Waveguides in the Long-Wave Infrared

Monolithic beam combined quantum cascade laser arrays with integrated arrayed waveguide gratings

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