Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Davis, Zachary; Abadal, G.; Helbo, Bjarne; Hansen, Ole; Campabadal, F.; Pérez‐Murano, F.; Estéve, J.; Figueras, E.; Verd, J.; Barniol, N.; Boisen, Anja

doi:10.1016/s0924-4247(03)00208-5

Cited by 45 publications

(40 citation statements)

References 10 publications

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“…A biosensor employs a biological or biochemical detector, which can range from single proteins and enzymes up to whole cells and microorganisms 1 . Atomic force microscopy (AFM) provides a relatively new approach to the study of specific biointeractions [1][2][3][4] . In the last decade, using AFM, several research groups observed that microcantilevers can transduce a number of different kinds of signals, e.g.…”

Section: Introductionmentioning

confidence: 99%

Sensing Immobilized Molecules of Streptavidin on a Silicon Surface by Maldi-Tof Mass Spectrometry and Fluorescence Microscopy

Araya

Kogan

Güell

et al. 2014

J. Chil. Chem. Soc.

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A hydrogen-terminated Si (111) surface was modified to form an aminoterminated monolayer for immobilization of streptavidin. Cleavage of an N-(ω-undecylenyl)-phthalimide covered surface using hidrazine yields an amino group-modified surface, which serves as a substrate for the attachment of biotin and subsequently streptavidin. We used surface analytical techniques to characterize the surface and to control the course of functionalization before the immobilization of streptavidin. To confirm the presence of the streptavidin Texas red on the surface two powerful techniques available in a standard biochemical laboratory are used, Fluorescence Microscopy and MALDI-TOF that allow us to detect and determine the immobilized streptavidin. This work provides an avenue for the development of devices in which the exquisite binding specificity of biomolecular recognition is directly coupled to a biosensor. In addition, we have demonstrated that MALDI-TOF and fluorescence microscopy are useful techniques for the characterization of silicon functionalized surfaces.

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Section: Introductionmentioning

confidence: 99%

Sensing Immobilized Molecules of Streptavidin on a Silicon Surface by Maldi-Tof Mass Spectrometry and Fluorescence Microscopy

Araya

Kogan

Güell

et al. 2014

J. Chil. Chem. Soc.

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“…Therefore, techniques able to measure these displacements with subnanometer accuracy in bandwidths of 1 Hz are required. Main techniques for the readout of the nanomechanical response include the optical lever method, 13 interferometry-based methods, 14,15 integrated optical waveguides, 16,17 capacitive read-out, 18,19 and the use of piezoresistive cantilevers. [20][21][22][23] The optical lever is the most widespread method because of its simplicity, extreme sensitivity, and the capability for measuring in vacuum, air, gas mixtures, and liquids.…”

Section: Introductionmentioning

confidence: 99%

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Martínez¹,

Kosaka²,

Tamayo³

et al. 2010

Review of Scientific Instruments

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A nano-cheese-cutter to directly measure interfacial adhesion of freestanding nano-fibers J. Appl. Phys. 111, 024315 (2012) Stabilization and growth of non-native nanocrystals at low and atmospheric pressures J. Chem. Phys. 136, 044703 (2012) Nanoparticle production in arc generated fireballs of granular silicon powder AIP Advances 2, 012126 (2012) Stability and topological transformations of liquid droplets on vapor-liquid-solid nanowires J. Appl. Phys. 111, 024302 (2012) Role of RuO3 for the formation of RuO2 nanorods Appl. Phys. Lett. 100, 033108 (2012) Additional information on Rev. Sci. Instrum. We present an instrument based on the scanning of a laser beam and the measurement of the reflected beam deflection that enables the readout of arrays of nanomechanical systems without limitation in the geometry of the sample, with high sensitivity and a spatial resolution of few micrometers. The measurement of nanoscale deformations on surfaces of cm 2 is performed automatically, with minimal need of user intervention for optical alignment. To exploit the capability of the instrument for high throughput biological and chemical sensing, we have designed and fabricated a two-dimensional array of 128 cantilevers. As a proof of concept, we measure the nanometer-scale bending of the 128 cantilevers, previously coated with a thin gold layer, induced by the adsorption and self-assembly on the gold surface of several self-assembled monolayers. The instrument is able to provide the static and dynamic responses of cantilevers with subnanometer resolution and at a rate of up to ten cantilevers per second. The instrumentation and the fabricated chip enable applications for the analysis of complex biological systems and for artificial olfaction.

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“…Monolithic integration with CMOS has also been proposed (33). However to reach the full potential, the issue of sensitivity and selectivity needs to be solved.…”

Section: Cantilever Designmentioning

confidence: 99%

The Metal Organic Films for Tailorable Chemical Sensing on Microcantilevers

et al. 2009

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A new generation of versatile microcantilever sensors with tailorable nanoporous metal-organic frameworks (MOFs) has been successfully demonstrated. Two metal-organic frameworks (MOFs), HKUST-1 and MOF-508 were characterized to demonstrate new stress-induced sensing mechanism. The microcantilever sensors were fabricated on silicon-on-insulator (SOI) wafers with 1 µm thickness of the final beam. The results exhibited extraordinary sensitivity, and a selective reversible response for chemical detection (1). Metal-organic frameworks (MOFs) are attracting attention as the ideal material for sensing applications because of their nanoporosity, ultrahigh surface area, and the fact that they can be tailored for adsorption of specific analytes (1). In this work, HKUST-1 was prepared and characterized to demonstrate that different MOFs can detect multiple analytes with microcantilever array (2). The elastic properties of MOFs were measured by nanoindentation test (MTS Nano-Indentor XP) and Raman microscope (Renishaw) was used to characterize coated MOFs-thin films on gold compared with MOFs powders.

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Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Cited by 45 publications

References 10 publications

Sensing Immobilized Molecules of Streptavidin on a Silicon Surface by Maldi-Tof Mass Spectrometry and Fluorescence Microscopy

Sensing Immobilized Molecules of Streptavidin on a Silicon Surface by Maldi-Tof Mass Spectrometry and Fluorescence Microscopy

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

The Metal Organic Films for Tailorable Chemical Sensing on Microcantilevers

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