Monolithic 3-D silicon photonics

Koonath, P.; Indukuri, Tejaswi; Jalali, Bahram

doi:10.1109/jlt.2006.871121

Cited by 53 publications

(27 citation statements)

References 26 publications

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“…1 Most notably, it has been proposed that they can be used as active filters and switching elements in integrated high-bandwidth photonic systems. 1,2 To date, the most successful and easily integrable geometry for these resonant structures is the microring resonator, which can be incorporated into conventional waveguide-based photonic integrated circuit (PIC) platforms, 3,4 with possible applications in large-scale telecommunications systems and in silicon photonic interconnects within and between electronic integrated circuit dice.…”

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confidence: 99%

“…Microring resonators with Q between approximately 1500 and 100,000 have been demonstrated using various technologies, including polysilicon ridge waveguides, 1 various silicon-on-insulator (SOI) structures, [4][5][6][7] and even exotic material systems. 1 Annular structures can be coupled to linear waveguides, and the interaction is described by simple coupling equations.…”

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Transmission of high-data-rate optical signals through a micrometer-scale silicon ring resonator

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Transmission of high-data-rate optical signals through a micrometer-scale silicon ring resonator

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“…Bahram Jalali in an unpublished 2006 paper has proposed an optically pumped Raman laser (or amplifier) in the form of an SOI microring coupled vertically to a linear SOI strip wavguide, a geometry quite similar to that of my electrically pumped laser. He has shown experimentally that an SOI microring "photonic layer" can be buried beneath a working CMOS transistor as part of a subterranean OEIC [25].…”

Section: Slotted Microring Eo Modulators and Light Emittersmentioning

confidence: 99%

Active Microring Resonator Devices in Silicon-on-Insulator

Soref

2006

3rd IEEE International Conference on Group IV Photonics, 2006.

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Abstract:Recent results from several laboratories are surveyed. The topics include SOIbased ultrafast electrooptical modulators, N x N routing switches, tunable filters-andadd/drops, Raman lasers and amplifiers, electrically pumped group IV lasers, optically pumped Er:SiO 2 -overclad slotted rings, and a variety of nonlinear optical devices. IntroductionMicrophotonic and nanophotonic components in SOI (or in SGOI or GOI) are key "enablers" for the next generation of Si-based waveguided photonic networks and opto-electronic integrated circuits (OEICs). Microring and microdisk resonators are advantageous microphotonic components because they can be interconnected densely on a chip and use minimal "real estate," allowing high functionality at low cost. Active rings offer versatility in applications, efficiency and low-power onchip actuation. The term "active" includes thermooptic (TO) electrooptic (EO) and opto-optical devices (those using nonlinear optical interactions). This talk will survey the recent results obtained at several laboratories on active microring resonator devices. Generally, the SiO 2 lower cladding in SOI, SGOI and GOI maintains the high Q of the resonators; whereas, without SiO 2 , the resulting suspended Si membrane is best for 2D photonic-crystal resonators analogous to the disks. In addition to 2D rings and disks, 3D silicon microsphere resonators have achieved visibility lately [1]. 2. Trimmable Optical Filters. Empirically, the resonators rarely "work as fabricated." Electromagnetic modeling software is not (yet) good enough to predict the resonances of a 3D device having very specific dimensions. So, in practice, the microring spectral filtering characteristic, as fabricated, does not match the design specifications. That is why trimming or tuning of the resonator(s) has become essential. Polymeric loading on the Si waveguide-controlled photo-oxidation of polysilane [2]--is a good way to trim the resonator permanently and stably. Trimming is an essential part of Luxtera's WDM [3]. Today, localized heating of the silicon waveguide (a TO index change) is the most explored and effective means of tuning the resonator, although electrooptical tuning of the ring (steady carrier injection or depletion) will be online soon. 3. Tunable Filters and Add/Drop Multiplexers. TO trimming-and-tuning has facilitated the worldrecord 1 GHz bandpass of a multi ring/MZI filter that has 5 GHz tunability [4]. The TO-activated polymeric two-ring reconfigurable add/drop multiplexer of Yamagata [5] could be realized easily in vertically stacked double-SOI containing two Si buses and two TO-tunable Si microrings, allowing significant WDM tuning. 4. 2 x 2 and N x N Optical Routing Switches. Stephen Emelett and I wrote several papers [6,7,8] on dual-microring switches (fixed-ring devices and floating-ring devices) that are readily cascaded into N x N crossbar-matrix crossconnects [9] or permutation-matrix network-routing switches. The preferred embodiments use carrier injection-or-depletion in both rings, obtained v...

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“…Due to the high refractive index of silicon (,3.5 at a wavelength of 1.5 mm), silicon waveguide circuits can be miniaturized to be several orders of magnitude smaller than silica waveguide circuits. Several types of circuits that employ submicron-scale silicon waveguides, such as waveguide splitters/couplers and micro-rings, [2][3][4] have been reported. In addition, a waveguide switch that uses a thermo-optical effect 5 and an ultra-fast silicon waveguide light modulator based on changes in the refractive index of silicon by carrier injection 6 have been reported.…”

Section: Introductionmentioning

confidence: 99%

Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers

Akihama

Hane

2012

Light Sci Appl

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Silicon photonic devices consisting of nanowire waveguides are a promising technology for on-chip integration in future optical telecommunication and interconnection systems based on silicon-large scale integration fabrication. However, the accommodation of variable optical components on a chip remains challenging due to the small size of microchips. In this study, we investigated the characteristics of a microelectromechanical silicon nanowire waveguide switch with a gap-variable coupler. Due to its capacitive operation, the proposed waveguide switch consumed negligible power relative to switches that use a thermo-optical effect and carrier injection. The proposed switch was characterized using analyses based on coupled-mode theory for rectangular waveguides, as well as a simulation using the finite difference time domain method. A 232 single switch with an improved configuration and a 236 multiple switch composed of the 232 switches was designed and fabricated by a combination of electron beam lithography, fast-atom beam etching and hydrofluoric acid vapor sacrificial etching. The properties of the switches were measured and evaluated at a wavelength of 1.55 mm. 1 The monolithic fabrication of silicon waveguides and silicon electronics is useful for future integration in opto-electronic systems. Due to the high refractive index of silicon (,3.5 at a wavelength of 1.5 mm), silicon waveguide circuits can be miniaturized to be several orders of magnitude smaller than silica waveguide circuits. Several types of circuits that employ submicron-scale silicon waveguides, such as waveguide splitters/couplers and micro-rings, 2-4 have been reported. In addition, a waveguide switch that uses a thermo-optical effect 5 and an ultra-fast silicon waveguide light modulator based on changes in the refractive index of silicon by carrier injection 6 have been reported. Recently, submicron-scale waveguide switches for optical path changes using the nano-mechanical motions of electrostatic actuators have been reported. 7 Due to the very low power consumption associated with capacitive operation, this technology suits the large-scale integration and reduced energy consumption requirements of telecommunication systems. [8][9][10][11][12][13][14][15][16] Among these waveguide circuits, coupler switches have attracted interest due to the use of non-contact low-loss mechanisms.13,15 A coupler switch using InP waveguides was operated by applying electrostatic forces between the freestanding waveguides. 13 In the case of a parallel-electrode actuator, a coupler gap smaller than two-thirds of the initial gap is not consistently controllable due to force instability. Using an in-plane comb-drive actuator, stable low-voltage operation has been realized for silicon waveguides.

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Monolithic 3-D silicon photonics

Cited by 53 publications

References 26 publications

Transmission of high-data-rate optical signals through a micrometer-scale silicon ring resonator

Transmission of high-data-rate optical signals through a micrometer-scale silicon ring resonator

Active Microring Resonator Devices in Silicon-on-Insulator

Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers

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