2014
DOI: 10.1002/sia.5495
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Momentum transfer dependence of reflection electron energy loss spectra: theory and experiment

Abstract: Measured reflection electron energy loss spectra excited by 2 keV electrons in Si are simulated by a Monte Carlo approach using the Chen-Kwei theory to calculate the position-dependent inverse inelastic mean free path. By comparing measured and calculated spectra, several prescriptions concerning the momentum transfer dependence of the material dielectric function are discussed. Our results lend support to the approximation (often taken with the only justification of making relations simpler) of neglecting the… Show more

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Cited by 15 publications
(19 citation statements)
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“…They are due to the interaction of the travelling electron with the surface charge induced by the electron in the earlier part of the trajectory . While the oscillating surface contribution is superimposed to the bulk IIMFP in the solid, it is not in the vacuum, leading to negative IIMFP values, interpreted as energy gained by the exiting electron …”
Section: Resultsmentioning
confidence: 99%
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“…They are due to the interaction of the travelling electron with the surface charge induced by the electron in the earlier part of the trajectory . While the oscillating surface contribution is superimposed to the bulk IIMFP in the solid, it is not in the vacuum, leading to negative IIMFP values, interpreted as energy gained by the exiting electron …”
Section: Resultsmentioning
confidence: 99%
“…An estimate of the thickness of the surface scattering zone is thus also given by the decay length tQ=1Q. We take Q=mvθEsinαθcosαcosφ2+θsinφ2, where θE=normalℏω2E, while θ and φ are the polar and azimuthal angles of scattering. For α = 0, Q=mvθE.…”
Section: Resultsmentioning
confidence: 99%
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