2015
DOI: 10.1002/sia.5884
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The spatial extent of surface effects on electron inelastic scattering

Abstract: We calculate the thickness of the surface scattering layer, defined as the region where electron inelastic scattering is affected by the surface, using the semi-classical treatment of electron energy loss provided by the Chen-Kwei theory. To this end, we consider the depth-dependent, surface-related contributions to the inverse inelastic mean free path, namely, the excitation of surface plasmons and the reduction in bulk plasmon excitation (Begrenzung effect). We find that surface effects extend further after … Show more

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“…The simulation methods include, e.g., MC or ab initio methods. They allow one to study the extent of surface effects on the inelastic scattering of a Si film [ 35 , 36 ].…”
Section: Methodsmentioning
confidence: 99%
“…The simulation methods include, e.g., MC or ab initio methods. They allow one to study the extent of surface effects on the inelastic scattering of a Si film [ 35 , 36 ].…”
Section: Methodsmentioning
confidence: 99%