Molecular dynamic study for nanopatterning using atomic force microscopy

Abstract

The atomic force microscopy (AFM)-based nanolithographic technique is currently used to directly machine material surfaces and fabricate nanocomponents for microelectromechanical systems (MEMS) devices. In the current study, three-dimensional molecular dynamic (MD) simulations with potentials based on the Morse function were performed to evaluate the effect of crystallographic factors and process variables on the nanodeformation characteristics of the nanolithography processing of monocrystalline copper. Moreover, the effects of process variables (tool shape, cutting speed, and ploughing depth) on the nanostructural pattern are investigated. The simulation results revealed that the crystal orientation and ploughing direction had a significant influence on varying the forces (cutting force, thrust force, and width-direction force); the nature of the nanodeformation ahead of the tool; and the surface quality of the machined material.

Study on Nanolithography Process of Polycrystalline Copper Using Molecular Dynamic Simulation

“…2(c) is the snapshot after the lithography process. Previous researchers notified that the pile-up in both sides of groove is almost symmetric [3][4][5]. Because the Berkovich indenter has very small contact angle, about 25 degree, between surface and indent incline, wide and low pile-up is created.…”

“…Y.S. Kim et al investigated the effect of crystal orientation and various tool shapes upon dislocation behaviors and plowing behaviors through AFM based nanolithography simulation [3]. D. Mulliah et al investigated the atomic-scale stick-slip phenomenon of a pyramidal diamond tip inserted into the Ag(010) surface [4].…”

A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation

“…A number of reports have investigated the various parameters that influence the rate of oxide formation associated with AFM based local anodic oxidation. The main factors are however the tip voltage and relative humidity, where the oxide growth rate is proportional to both the applied tip voltage and relative humidity [8,9].…”

Structural Transformation of High Vanadium High Speed Steel during Tempering and its Influence on Abrasive Wear Performance of the Material

“…The high vanadium HSS is a new kind of wear resistant material developed in recent years which extensive use in roller, hammer, spear plate and etc [1,2]. Its service life is about 4-7 times of high-chromium cast iron´s when increasing the amount of vanadium in the high carbon HSS to form the M 2 C carbide and more fine MC carbide with invigoration effect of the elements of M O , W and V [3,4].…”