A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation

Gan, Yong; Wong, H.Y.; Lee, W.P.

doi:10.1016/j.compositesb.2010.12.007

Cited by 2 publications

(1 citation statement)

References 7 publications

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“…In another study involving electrical current and oxidation, Perez-Murano et al [ 7 ] adopted a local oxidation method to grow silicon oxide mounds with nanometer scale on the Si(100) surfaces exposed to air by utilizing an AFM tip in tapping mode. While Gan et al [ 8 ] proposed automatic patterning with AFM through local anodic oxidation, with numerous oxide structures being successfully created to demonstrate the ability of this low cost and accurate system.…”

Section: Introductionmentioning

confidence: 99%

Automatic hammering of nano-patterns on special polymer film by using a vibrating AFM tip

2012

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Complicated nano-patterns with linewidth less than 18 nm can be automatically hammered by using atomic force microscopy (AFM) tip in tapping mode with high speed. In this study, the special sample was thin poly(styrene-ethylene/butylenes-styrene) (SEBS) block copolymer film with hexagonal spherical microstructures. An ordinary silicon tip was used as a nano-hammer, and the entire hammering process is controlled by a computer program. Experimental results demonstrate that such structure-tailored thin films enable AFM tip hammering to be performed on their surfaces. Both imprinted and embossed nano-patterns can be generated by using a vibrating tip with a larger tapping load and by using a predefined program to control the route of tip movement as it passes over the sample’s surface. Specific details for the fabrication of structure-tailored SEBS film and the theory for auto-hammering patterns were presented in detail.

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Section: Introductionmentioning

confidence: 99%