2010
DOI: 10.1016/j.apsusc.2010.04.005
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Molecular dynamic simulations of nanoindentation in aluminum thin film on silicon substrate

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Cited by 102 publications
(32 citation statements)
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“…Molecular dynamics (MD) is a powerful tool that can be incorporated as a pseudo-experimental tool to address the size effect during the nanoindentation. In the case of crystalline metals, many different aspects of nanoindentation experiment, such as initial dislocation nucleation and evolution pattern [79,81,83], the effect of surface step [80], effects of GB [84,88,126,127], the effect of film thickness [128], the effect of substrate [129], the effect of residual stress [130], the effect of boundary conditions [85] and size effects during nanoindentation [86,87] have been investigated using MD. Szlufarska [131] summarized the advances in atomistic modelling of the nanoindentation experiment.…”
Section: Atomistic Simulation Of Nanoindentationmentioning
confidence: 99%
See 1 more Smart Citation
“…Molecular dynamics (MD) is a powerful tool that can be incorporated as a pseudo-experimental tool to address the size effect during the nanoindentation. In the case of crystalline metals, many different aspects of nanoindentation experiment, such as initial dislocation nucleation and evolution pattern [79,81,83], the effect of surface step [80], effects of GB [84,88,126,127], the effect of film thickness [128], the effect of substrate [129], the effect of residual stress [130], the effect of boundary conditions [85] and size effects during nanoindentation [86,87] have been investigated using MD. Szlufarska [131] summarized the advances in atomistic modelling of the nanoindentation experiment.…”
Section: Atomistic Simulation Of Nanoindentationmentioning
confidence: 99%
“…• Using the free surface for the sample top and bottom, incorporating the periodic boundary conditions for the remaining surfaces and putting a substrate under the thin film (see, e.g., Peng et al [129]). • Incorporating the free surfaces for the sample top and bottom, using periodic boundary conditions for the remaining surfaces and equilibrating the sample by adding some forces (see, e.g., Li et al [81]; Lee et al [83]).…”
Section: Atomistic Simulation Of Nanoindentationmentioning
confidence: 99%
“…Por último, en la zona de descarga se observa cómo a medida que el indentador retrocede, el material se recupera elásticamente (zona 3). La pendiente de la curva indica qué tanto se puede recuperar elásticamente el material [40]. Es claro entonces, que los resultados observados a partir de las simulaciones desarrolladas utilizando la interfaz gráfica, presentan un comportamiento coherente con lo que se observa en pruebas experimentales, reproduciéndose, de este modo, las tendencias de las curvas características de carga-descarga.…”
Section: Resultados Y Discusionesunclassified
“…The Tersoff/ZBL potential is revised through Tersoff potential. The Tersoff/ZBL potential is a function formed by the Tersoff function and Ziegler-Biersack-Littmark universal screening function [51,52]; it can describe the collision process of incident particles and target atoms very well. The Lennard-Jones potential was used to describe the Si-He, C-He, and He-He interactions [53].…”
Section: Models and Computational Detailsmentioning
confidence: 99%