“…In particular, epitaxial growths of Bi 2 Se 3 have been reported for various substrates including Si(111), [181][182][183][184] grapheneterminated 6H-SiC(0001), 174,185) SrTiO 3 (111), 186) GaAs (111), 187) sapphire (0001), 173,188,189) CdS(0001), 190) and InP (111). 191) It turned out that the control of the substrate temperature is the most crucial ingredient for obtaining high-quality films of Bi 2 Se 3 with a large area of atomically flat terraces. 189) In particular, a two-step method in which the depositions of the first layer and subsequent layers are done at different temperatures, to promote initial adhesion and crystallization separately, has been reported to yield best quality films.…”