2018
DOI: 10.1149/2.002107jss
|View full text |Cite
|
Sign up to set email alerts
|

Moisture Insensitive PMMA Coated Pt-AlGaN/GaN Diode Hydrogen Sensor and Its Thermal Stability

Abstract: Poly(methyl methacrylate) (PMMA) encapsulated Pt-AlGaN/GaN Schottky diodes show highly sensitive (100 ppm, 0.01% by volume) room temperature detection of hydrogen and are insensitive to the presence of water in the sensing ambient. These diodes show no physical degradation or loss of sensitivity when repeatedly cycled (50 x, 1 min hold at each temperature) between 25-100 • C. There is complete selectivity for hydrogen sensing over other gases, including CO, CO 2 , NO 2 , O 2 and CH 4 . The PMMA encapsulation p… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

1
9
0

Year Published

2019
2019
2024
2024

Publication Types

Select...
8

Relationship

2
6

Authors

Journals

citations
Cited by 10 publications
(10 citation statements)
references
References 46 publications
1
9
0
Order By: Relevance
“…The relative current change for PMMA-coated diode sensors reached the maximum value of 805% in wet H 2 ambient conditions at room temperature. The PMMA layer performed well in ZnO SBDs as a membrane layer, which selectively blocked water molecules, as previously reported by the authors [21,22]. Figure 4b presents the transient change in SBH of Pt/ZnO SBDs in dry H 2 and PMMA-coated Pt/ZnO diodes in wet H 2 ambient conditions.…”
Section: Methodssupporting
confidence: 80%
See 1 more Smart Citation
“…The relative current change for PMMA-coated diode sensors reached the maximum value of 805% in wet H 2 ambient conditions at room temperature. The PMMA layer performed well in ZnO SBDs as a membrane layer, which selectively blocked water molecules, as previously reported by the authors [21,22]. Figure 4b presents the transient change in SBH of Pt/ZnO SBDs in dry H 2 and PMMA-coated Pt/ZnO diodes in wet H 2 ambient conditions.…”
Section: Methodssupporting
confidence: 80%
“…The increase in operation temperature and the addition of select dopants were proposed to mitigate the effects of water on the sensitivity [19,20]. In the case of diode-based gas sensors, the sensitivity and selectivity were reported to be severely degraded in humid air conditions [21][22][23]. Under the exposure of water vapor, the surface-active sites for gas adsorption can be blocked by water molecules, thus resulting in the sensitivity drop in the presence of water vapor.…”
Section: Introductionmentioning
confidence: 99%
“…Polymethylmethacrylate (PMMA) polymer has good properties for use in electronic and storage devices and sensors. Also, it is noted to have a good thermal stability under different environmental conditions [19,22]. Polydimethylsiloxane (PDMS) is a polymer used because of its low cost, high thermal expansion coefficient, and good adhesion to silicon.…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8][9][10] Various types of sensors based on the GaN, including Schottky diode, nanowire and AlGaN/GaN high electron mobility transistor (HEMT) have been reported for fast and sensitive detection of hydrogen. [6][7][8][9][10][11][12][13][14][15][16] The authors have reported several GaN based hydrogen sensors. The responsivities of the devices to hydrogen exposures were improved by employing Pt nanonetwork sensing material, 11,12 photo-chemically roughened GaN surface, 7,8 and different crystal planes 9,10,13 .…”
mentioning
confidence: 99%
“…Also, the effect of the humidity on hydrogen sensor performance was mitigated by using the moisture barrier encapsulation. [14][15][16] One of the remaining issues with GaN based hydrogen sensor is the effect of ambient temperature on sensing signal. The current level or resistance of the semiconductor based sensor is affected by the temperature.…”
mentioning
confidence: 99%