Modified POF Sensor for Gaseous Hydrogen Fluoride Monitoring in the Presence of Ionizing Radiations

Corbellini, Simone; Parvis, Marco; Grassini, Sabrina; Benussi, L.; Bianco, S.; Colafranceschi, S.; Piccolo, D.

doi:10.1109/tim.2011.2175821

Cited by 21 publications

(9 citation statements)

References 25 publications

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“…Beside cleaning and sterilization purposes, plasma ion assisted deposition and plasma enhanced chemical vapor deposition processes play a decisive role in modern product development [1]- [3]. In [4] for example, a plastic optical fiber sensor is presented, covered with a thin layer of glass-like film deposited in a lowpressure plasma process.…”

Section: Introductionmentioning

confidence: 99%

The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

Schulz

Styrnoll

Awakowicz

et al. 2015

IEEE Trans. Instrum. Meas.

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A novel compact plasma sensor applicable for the supervision and control of industrial plasma processes is presented in this contribution. Based on the multipole resonance probe (MRP), the new planar MRP (pMRP) is introduced as a powerful and economical monitoring tool, flush-mounted into the reactor wall. Hence, it can be used for an effective suppression of disturbances of the plasma process itself. Using 3D electromagnetic field simulations with CST Microwave Studio, the pMRP is investigated and challenges as well as prospects of the new sensor design are discussed in detail. Three different sensor versions are presented and compared with the resonance behavior of the MRP. Furthermore, limitations concerning position tolerances are shown and the suitability of the pMRP is proven. Measurements in a double inductive coupled plasma, with argon as process gas and varying excitation powers, demonstrate the suitability of the pMRP for monitoring purposes. Index Terms-3D electromagnetic field simulations, active plasma resonance spectroscopy (APRS), double inductive coupled plasma (DICP), Drude model, multipole resonance probe (MRP), planar plasma sensor, sensor applications.

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Section: Introductionmentioning

confidence: 99%

The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

Schulz

Styrnoll

Awakowicz

et al. 2015

IEEE Trans. Instrum. Meas.

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show abstract

“…If, as usual, the fiber is made of PMMA, the maximum temperature is typically limited to 70 °C. Among the different techniques, sol gel [ 13 ] has been used for the deposition of thick coatings, which are sensitive to pH and other quantities mainly in the liquid phase, while vacuum techniques, such as DC plasma sputtering and plasma-enhanced chemical vapor deposition (PECVD) [ 14 ] have been used for making sensors sensitive to gas compounds.…”

Section: Plastic Optical Fiber Sensorsmentioning

confidence: 99%

“…The sensors described in this section [ 18 , 19 ] have been designed to monitor the concentration of hydrogen fluoride vapors inside the resistive plate chamber (RPC) detectors of the Compact Muon Solenoid experiment at CERN laboratory in Geneva (Switzerland) [ 20 ]. These RPCs are composed of two Bakelite plates, maintained at a distance of 2 mm.…”

Section: Hf Sensor Obtained Via Pecvd Depositionmentioning

confidence: 99%

Design and Deployment of Low-Cost Plastic Optical Fiber Sensors for Gas Monitoring

Grassini

Ishtaiwi

Parvis

et al. 2014

Sensors

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This paper describes an approach to develop and deploy low-cost plastic optical fiber sensors suitable for measuring low concentrations of pollutants in the atmosphere. The sensors are designed by depositing onto the exposed core of a plastic fiber thin films of sensitive compounds via either plasma sputtering or via plasma-enhanced chemical vapor deposition (PECVD). The interaction between the deposited layer and the gas alters the fiber's capability to transmit the light, so that the sensor can simply be realized with a few centimeters of fiber, an LED and a photodiode. Sensors arranged in this way exhibit several advantages in comparison to electrochemical and optical conventional sensors; in particular, they have an extremely low cost and can be easily designed to have an integral, i.e., cumulative, response. The paper describes the sensor design, the preparation procedure and two examples of sensor prototypes that exploit a cumulative response. One sensor is designed for monitoring indoor atmospheres for cultural heritage applications and the other for detecting the presence of particular gas species inside the RPC (resistive plate chamber) muon detector of the Compact Muon Solenoid (CMS) experiment at CERN in Geneva.

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“…Typical PMMA-SI-POF intensiometric sensors are based on the variation of: (i) the propagation loss along the fiber (either for local microbending, as for example in [20] and [21], or in distributed form, as in [22]); (ii) the light collected after a free space propagation (as in [23], [24], and [25]); (iii) the interaction through evanescent field tails (as in [26], [27] and [28]).…”

Section: Sensing With Pmma-si-pofmentioning

confidence: 99%

Step-Index PMMA Fibers and Their Applications

Abrate¹,

Gaudino²,

Perrone³

2013

Current Developments in Optical Fiber Technology

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Modified POF Sensor for Gaseous Hydrogen Fluoride Monitoring in the Presence of Ionizing Radiations

Cited by 21 publications

References 25 publications

The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

Design and Deployment of Low-Cost Plastic Optical Fiber Sensors for Gas Monitoring

Step-Index PMMA Fibers and Their Applications

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