“…In the CBD process, the influence of the deposition parameters on film formation, particularly the role of deposition temperature on the film structure and properties, is extremely critical. It has been reported that increase of deposition temperature can accelerate the film growth [21], lower the band gap [22][23][24][25], increase conductivity [22], and improve the crystallinity [4,25] by various groups. However, the comprehensive study on the influence of deposition temperature on film physical properties was very few.…”