Modelling of Glow Discharge Optical Emission Spectroscopy depth profiles of metal (Cr,Ti) multilayer coatings

Galindo, R. Escobar; Albella, J. M.

doi:10.1016/j.sab.2007.12.006

Cited by 11 publications

(4 citation statements)

References 44 publications

(55 reference statements)

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“…Nevertheless, more than a decade later, deconvolution procedures are yet to be integrated into any commercially available GDOES software. In an alternative approach, Escobar and Albella [84] recently reported on a simple model for interpreting and predicting the depth profiles of periodic multilayer structures of two elements, where the individual layer thicknesses are in the range of 10-100 nm (i.e., within the order of magnitude of roughness induced when depth profiling using GDOES techniques). The model is based on the assumption that the surface roughening produced by the ion bombardment gives rise to the partial mixing of the layers and their interfaces, leading to a smoothing of the otherwise abrupt profiles.…”

Section: Glow-discharge Optical Emission Spectroscopy (Gdoes)mentioning

confidence: 99%

“…Taken from [83] and reproduced with the permission of Elsevier. Right: a the GDOES experimental depth profile of a 10×(70 nm Ti/150 nm Cr) multilayer; b the simulated depth profile obtained using the nominal individual thicknesses from (a) and the degradation constant shown in Table 1 of [84]. Reproduced with the permission of Elsevier Fig.…”

Section: Glow-discharge Optical Emission Spectroscopy (Gdoes)mentioning

confidence: 99%

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Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES

Galindo

Gago

Duday³

et al. 2010

Anal Bioanal Chem

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An increasing amount of effort is currently being directed towards the development of new functionalized nanostructured materials (i.e., multilayers and nanocomposites). Using an appropriate combination of composition and microstructure, it is possible to optimize and tailor the final properties of the material to its final application. The analytical characterization of these new complex nanostructures requires high-resolution analytical techniques that are able to provide information about surface and depth composition at the nanometric level. In this work, we comparatively review the state of the art in four different depth-profiling characterization techniques: Rutherford backscattering spectroscopy (RBS), secondary ion mass spectrometry (SIMS), X-ray photoelectron spectroscopy (XPS) and glow discharge optical emission spectroscopy (GDOES). In addition, we predict future trends in these techniques regarding improvements in their depth resolutions. Subnanometric resolution can now be achieved in RBS using magnetic spectrometry systems. In SIMS, the use of rotating sample holders and oxygen flooding during analysis as well as the optimization of floating low-energy ion guns to lower the impact energy of the primary ions improves the depth resolution of the technique. Angle-resolved XPS provides a very powerful and nondestructive technique for obtaining depth profiling and chemical information within the range of a few monolayers. Finally, the application of mathematical tools (deconvolution algorithms and a depth-profiling model), pulsed sources and surface plasma cleaning procedures is expected to greatly improve GDOES depth resolution.

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Section: Glow-discharge Optical Emission Spectroscopy (Gdoes)mentioning

confidence: 99%

Section: Glow-discharge Optical Emission Spectroscopy (Gdoes)mentioning

confidence: 99%

Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES

Galindo

Gago

Duday³

et al. 2010

Anal Bioanal Chem

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“…In the 90s Oswald et al [24] and Präßler et al [25] used deconvolution procedures to improve GDOES depth profiles by using information on crater formation. More recently, Escobar Galindo and Albella [26] proposed a simple model to interpret and predict the depth profiles of periodic multilayer structures with individual layer thickness in the range 10-100 nm, i.e. within the order of magnitude of roughness induced during depth profiling by GDOES.…”

Section: Introductionmentioning

confidence: 99%

Dynamics of GDOES-induced surface roughening in metal interfaces

Galindo

Vázquez

2014

Anal Bioanal Chem

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The roughness induced during glow-discharge optical-emission spectroscopy (GDOES) measurements has been reported to cause a loss of resolution during GDOES depth-profiling analysis. In this paper, we undertake for the first time a study of the dynamics of the surface morphology of chromium and titanium thin films (designed in mono and multilayer structures) under the impinging of GDOES incoming ions. We performed this study under the theoretical framework of the dynamic scaling theory, by analysing surface morphology changes, as measured ex-situ by AFM, with irradiation time. For single metal layers it was found that, after an initial surface smoothening, the surface undergoes a rapid steep roughening for both systems, with quite similar quantitative dynamics. Once this roughening ends a second temporal scaling regime arises, operating for long length scales with dynamics depending on the sputtering rate of the material. For the chromium layer, with a very high sputtering rate of 5.5 μm min(-1), this regime is consistent with the KPZ model, whereas for the titanium layer an EW scaling regime is indicated. These different scaling regimes are consistent with the development of larger surface slopes for the Cr system. In the multilayer systems, the initial roughness induced on the top Cr layer by GDOES has similar dynamics to that for single-layer Cr. However, a clear decrease in the roughness was observed once the underlying Ti layer, with a lower sputtering rate, was reached. This decrease in the induced roughness is maintained while the Ti layer is eroded. Therefore, choice of appropriate material (i.e. sputtering yield values) combinations and of their depth of location can enable tuning of GDOES-induced roughness and achieve substantial control over the depth profiling process.

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“…Escobar Galindo and Albella presented a method to model the broadening effects found in depth profiles of periodic multilayers obtained by GD-OES. The method assumes that the surface roughening due to ion bombardment leads to a partial mixing of the layers, thereby smoothening the depth profiles.…”

Section: Glow Discharge Optical Emission and Mass Spectrometrymentioning

confidence: 99%