Modelling and optimization of single drive 3-axis MEMS gyroscope

Din, Hussamud; Iqbal, Faisal; Lee, Byeungleul

doi:10.1007/s00542-020-04840-7

Cited by 9 publications

(8 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Furthermore, the experimental results of the fabricated design are compared with the reported techniques as listed in Table 3, showing the contribution and significance of the proposed technique for CAS reduction. viously fabricated with a different design, although the previous design did not follow the proposed design rules [27]. However, the CAS has been reduced when the ratio approached 1, validating the significance of the proposed methodology.…”

Section: Resultsmentioning

confidence: 78%

“…Figure 12 reveals the experimental results, depicting the cross-axis sensitivity of the fabricated device, which is comparatively high. The experimentally tested device was previously fabricated with a different design, although the previous design did not follow the proposed design rules [ 27 ]. However, the CAS has been reduced when the ratio approached 1, validating the significance of the proposed methodology.…”

Section: Resultsmentioning

confidence: 99%

“…The single-drive multi-axis MEMS gyroscope structure was previously designed to consist of four masses named

, and

, coupled by a Z-shaped coupling spring as shown in Figure 1 [ 27 ], whereas the resonant modes are shown in Figure 2 . The inner double-folded springs along with the coupling springs are responsible for the in-plane drive motion.…”

Section: Mechanical Structure Of the Designed Gyroscopementioning

confidence: 99%

“…The drive-scheme of the designed single-drive multi-axis MEMS gyroscope generating different drive displacement amplitudes for both x and y-axes, and this was achieved with the use of a unique Z-shaped coupling spring which can limit the drive displacement amplitudes in one of the two coupled axes; i.e.,

[ 27 ]. For an optimized structure with low cross-axis sensitivity, it is suggested that drive displacement amplitudes ratio “

, described in Equation (7), and sense frequency difference ratio “

, described in Equation (8), should be same, or their ratio should be equal or approaching to 1, as described in Equation (9).…”

Section: Design Approachmentioning

confidence: 99%

“…However, COMSOL Multiphysics offers a more straightforward approach, relatively more accurate and informative than other approaches for CAS analysis. In this work, a previously designed simplified single-drive multi-axis MEMS gyroscope utilizing a mode-split approach [ 27 ] was analyzed for CAS using the established finite element analysis (FEA) based methodology [ 28 ]. A two-point measurement method for cross-axis displacement in the designed gyroscope was introduced.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

2021

Self Cite

View full text Add to dashboard Cite

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

show abstract

Section: Resultsmentioning

confidence: 78%

Section: Resultsmentioning

confidence: 99%

“…The single-drive multi-axis MEMS gyroscope structure was previously designed to consist of four masses named

, and

Section: Mechanical Structure Of the Designed Gyroscopementioning

confidence: 99%

[ 27 ]. For an optimized structure with low cross-axis sensitivity, it is suggested that drive displacement amplitudes ratio “

, described in Equation (7), and sense frequency difference ratio “

, described in Equation (8), should be same, or their ratio should be equal or approaching to 1, as described in Equation (9).…”

Section: Design Approachmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

2021

Self Cite

View full text Add to dashboard Cite

show abstract

Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity

Din

Iqbal

Lee

2021

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization

Hou,

Zhang,

Hao

et al. 2024

Meas. Sci. Technol.

View full text Add to dashboard Cite

Micro-electromechanical systems (MEMS) gyroscope has important applications in many fields such as aviation, spaceflight, weaponry and automatic driving. To improve the robustness and sensitivity, we design a novel dual-mass MEMS gyroscope based on the mode localization in this paper. The gyroscope structure consists of a pair of perturbation systems connected with weakly coupled resonator systems (WCRS). It has the advantage of eliminating the mode matching and achieving the mode localization effect. The dynamic behaviors of MEMS gyroscope are developed by the multi-scale method. The detection characteristics of amplitude ratio (AR) and amplitude difference (AD) are compared. Combining numerical simulation, we analyzed the influence of critical parameter. It is indicated that the sensitivity can reach up to 56199.78 ppm/°/s through AR output, which is two magnitudes higher than the traditional MEMS gyroscope. For the detection of micro-angular rate, the AD output has advantages in sensitivity, and AR output has a smaller nonlinearity error. In addition, structural parameters, especially the voltage of perturbation parallel plate, have a significant impact on system sensitivity. If the breakdown voltage meets condition, the sensitivity can be enhanced more than ten times by amplifying the voltage, which further broaden the application field of the MEMS gyroscope.

show abstract

Modelling and optimization of single drive 3-axis MEMS gyroscope

Cited by 9 publications

References 11 publications

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity

Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization

Contact Info

Product

Resources

About