Modeling the sensitivity dependence of silicon-photonics-based ultrasound detectors

Tsesses, Shai; Aronovich, D. A.; Grinberg, Assaf; Hahamovich, Evgeny; Rosenthal, Amir

doi:10.1364/ol.42.005262

Cited by 13 publications

(17 citation statements)

References 27 publications

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“…A nearly ideal sensor geometry can be achieved by creating miniaturized π-BGs in optical waveguides, which can generate greater RI contrast than optical fibers. One example of such waveguides is silicon-on-insulator waveguides 81 , 82 , for which sensors on the order of 0.5 × 30 µm have been built.…”

Section: Optical Sensing Of Ultrasoundmentioning

confidence: 99%

Looking at sound: optoacoustics with all-optical ultrasound detection

et al. 2018

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Originally developed for diagnostic ultrasound imaging, piezoelectric transducers are the most widespread technology employed in optoacoustic (photoacoustic) signal detection. However, the detection requirements of optoacoustic sensing and imaging differ from those of conventional ultrasonography and lead to specifications not sufficiently addressed by piezoelectric detectors. Consequently, interest has shifted to utilizing entirely optical methods for measuring optoacoustic waves. All-optical sound detectors yield a higher signal-to-noise ratio per unit area than piezoelectric detectors and feature wide detection bandwidths that may be more appropriate for optoacoustic applications, enabling several biomedical or industrial applications. Additionally, optical sensing of sound is less sensitive to electromagnetic noise, making it appropriate for a greater spectrum of environments. In this review, we categorize different methods of optical ultrasound detection and discuss key technology trends geared towards the development of all-optical optoacoustic systems. We also review application areas that are enabled by all-optical sound detectors, including interventional imaging, non-contact measurements, magnetoacoustics, and non-destructive testing.

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Section: Optical Sensing Of Ultrasoundmentioning

confidence: 99%

Looking at sound: optoacoustics with all-optical ultrasound detection

et al. 2018

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“…More recently, ultrasound detection has been demonstrated with waveguides fabricated in siliconphotonics technology, in particular in silicon-on-insulator (SOI) substrates [10]- [12]. The fabrication of optical waveguides in SOI substrates is performed via semiconductor fabrication techniques, characterized by their high reproducibility and mass-production capability.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, the high refractive index of silicon, which was used as the core material in Refs. [10]- [12], enabled a higher level of miniaturization than the one achievable by polymer cores, and the use of an over-cladding to protect the fabricated structures without significantly changing the size of the guided mode. The main disadvantage of the SOI platform is the relatively low photo-elastic coefficient of silicon, potentially limiting the sensitivity that may be achieved for ultrasound detection.…”

Section: Introductionmentioning

confidence: 99%

Enhanced Sensitivity of Silicon-Photonics-Based Ultrasound Detection via BCB Coating

et al. 2019

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Ultrasound detection via silicon waveguides relies on the ability of acoustic waves to modulate the effective refractive index of the guided modes. However, the low photo-elastic response of silicon and silica limits the sensitivity of conventional silicon-oninsulator sensors, in which the silicon core is surrounded by a silica cladding. In this paper, we demonstrate that the sensitivity of silicon waveguides to ultrasound may be significantly enhanced by replacing the silica over-cladding with bisbenzocyclobutene (BCB)-a transparent polymer with a high photo-elastic coefficient. In our experimental study, the response to ultrasound, in terms of the induced modulation in the effective refractive index, achieved for a BCB-coated silicon waveguide with TM polarization was comparable to values previously reported for polymer waveguides and an order of magnitude higher than the response achieved by an optical fiber. In addition, in our study, the susceptibility of the sensors to surface acoustic waves and reverberations was reduced for both TE and TM modes when the BCB over-cladding was used.

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“…An MZI optical microphone is demonstrated in [12] for acoustic waves in air up to 20 kHz, i.e., limited to frequencies of human hearing. For waveguides fabricated in SOI, on a rigid substrate and inserted in the arms of a fiber-based MZI, the effect of polarization and waveguide dimensions on the sensitivity of ultrasound detection is analyzed in [13].…”

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confidence: 99%