Modeling of nanofabricated paddle bridges for resonant mass sensing

Lobontiu, Nicolae; Ilić, B.; Garcia, Ephrahim; Reissman, Timothy; Craighead, Harold G.

doi:10.1063/1.2221560

Cited by 21 publications

(18 citation statements)

References 21 publications

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“…Lobontiu et al . [ 116 , 117 , 118 ] had successfully developed mathematical models to predict the resonant frequency of single and doubly clamped beam resonators with variable cross section or multisegments. Looker and Sader [ 119 ] presented an analytical model for the fundamental bending resonant frequency of thin rectangular cantilever plates, which is valid for all aspect and Poisson ratios.…”

Section: Resonator Structures and Materialsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

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Section: Resonator Structures and Materialsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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“…11,15 Improvements to this analytical model can be produced when considering that all cantilever segments possess both compliance and inertia properties. 16,17 Mass deposition, particularly in a layerlike manner, has also been modeled by means of the finite element method. 18 Designing cantilevers for mass detection that are built of different segments serves, on one hand, the necessity of having a paddle-type portion for mass attachment ͑particularly when that area is functionalized with a substance that is affine to the matter to be attached͒.…”

Section: Introductionmentioning

confidence: 99%

Modeling, design, and characterization of multisegment cantilevers for resonant mass detection

Lobontiu

Lupea

Ilic

et al. 2008

Journal of Applied Physics

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The work presents the analytic modeling, design, and the experimental and numerical characterization of multisegment cantilevers’ bending and torsion resonant responses with the aim of evaluating the amount and position of matter which deposits on these elastic structures. The cantilevers may comprise any number of geometrically different segments that are serially connected, and actual results are presented for the two-segment, circularly notched configuration. The generic analytical model, which formulates the bending and torsion resonant frequencies of both the original cantilever and the one with the attached mass, is derived by means of Rayleigh’s quotient approach. Relationships are formulated between nondimensional parameters characterizing the geometry, resonant frequencies, and deposited mass amount and position for both bending and torsion. The sensitivity of the frequency shift to the landing parameters and mass amount are also studied. Analytical model, finite element, and experimental testing data corresponding to the bending and torsion resonant responses of macro- and nano-two-segment, circularly notched cantilever specimens are in agreement. The analytical model of the circularly notched cantilever is further employed to investigate the relationships between the cantilever geometry parameters, the deposited mass amount, and its landing position to the change in the bending and torsion resonant frequency.

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“…Also, a mismatch of the thermal expansion coefficient of an additional material (i.e., ZIFs in this work) on the silicon resonator might induce stress, resulting in a frequency shift and a degradation in the quality factor [14]. The minimum detectable mass is calculated as δM = 2m eff δ f / f 0 τ , where m eff (∼2.39 × 10 −9 g) is the effective mass by means of Rayleigh's principle [15]. Hence, the limit of detection of the ZIF-coupled resonator for gas sensing is expected to be ∼0.13 pg, and the corresponding gas concentration is approximately 15 ppm of CO 2 .…”

Section: Methodsmentioning

confidence: 99%

Zeolitic imidazolate framework-coupled resonators for enhanced gas detection

Hwang

Phan²,

Galatsis

et al. 2013

J. Micromech. Microeng.

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This work presents for the first time a zeolitic imidazolate framework (ZIF)-coupled resonant gas sensor whose sensitivity shows an improvement up to 78 times over bare silicon resonant sensors with identical dimensions. ZIFs are among the highest surface area material used for resonant-based sensing. We utilize high surface area-to-volume ratios of ZIFs to demonstrate how a microresonator coupled with ZIF crystals can provide high sensitivity to chemical vapors.

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Modeling of nanofabricated paddle bridges for resonant mass sensing

Cited by 21 publications

References 21 publications

Tunable Micro- and Nanomechanical Resonators

Tunable Micro- and Nanomechanical Resonators

Modeling, design, and characterization of multisegment cantilevers for resonant mass detection

Zeolitic imidazolate framework-coupled resonators for enhanced gas detection

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