1997
DOI: 10.1116/1.580790
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Modeling of Ge segregation in the limits of zero and infinite surface diffusion

Abstract: A model to treat Ge segregation with simultaneous growth and exchange during Si/SiGe layer growth by molecular beam epitaxy is described. Within this three layer formalism, the segregating layers were treated in two limiting cases, a solid surface model in which no surface diffusion occurs, and a fluid surface model, in which surface diffusion is very fast. Simultaneous treatment of exchange and growth within the fluid surface model was the only one of the two that allowed the accumulation of Ge in the top two… Show more

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Cited by 35 publications
(30 citation statements)
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“…The kinetics involved in the incorporation of Bi in GaAs are very similar to previous studies and models of other segregating species, for example, Ge in SiGe [127,128], dopants in Si [129], and both cation [130,131] and anion [132] exchange in III-Vs. Importantly, the existence of a window for smooth, droplet-free GaAsBi growth provides a guide for the growth of different compositions.…”
Section: Dilute Bismidessupporting
confidence: 78%
“…The kinetics involved in the incorporation of Bi in GaAs are very similar to previous studies and models of other segregating species, for example, Ge in SiGe [127,128], dopants in Si [129], and both cation [130,131] and anion [132] exchange in III-Vs. Importantly, the existence of a window for smooth, droplet-free GaAsBi growth provides a guide for the growth of different compositions.…”
Section: Dilute Bismidessupporting
confidence: 78%
“…3. The kinetics involved in the incorporation of Bi in GaAs are very similar to previous studies and models of other segregating species, for example Ge in SiGe [13,14], dopants in Si [15], and both cation [16,17] and anion [18] exchange in III-Vs. Importantly, the existence of a window for smooth, droplet-free GaAsBi growth provides a guide for the growth of different compositions.…”
Section: Resultsmentioning
confidence: 55%
“…We use the model described in Ref. to simulate the as‐grown Ge profile, which is affected by Ge segregation. The modifications of this profile due to Ge diffusion during thermal treatment are calculated for a series of diffusion lengths L D in the range between 0 and 15 ML assuming a Ge diffusion coefficient independent of the local Ge concentration.…”
Section: Evolution Of Structural and Optical Propertiesmentioning
confidence: 99%